Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China

Ding Zhao, Yu Hong, William Tiddi, Anna Elsukova, Marco Beleggia, Min Qiu, Anpan Han

    Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

    129 Downloads (Pure)
    Original languageEnglish
    Publication date2018
    Number of pages2
    Publication statusPublished - 2018
    EventThe 7th International Workshop on Focused Electron Beam-Induced Processing (FEBIP) - Modena, Italy
    Duration: 10 Jul 201813 Jul 2018
    http://web.nano.cnr.it/FEBIP2018-Modena/

    Conference

    ConferenceThe 7th International Workshop on Focused Electron Beam-Induced Processing (FEBIP)
    CountryItaly
    CityModena
    Period10/07/201813/07/2018
    Internet address

    Cite this

    Zhao, D., Hong, Y., Tiddi, W., Elsukova, A., Beleggia, M., Qiu, M., & Han, A. (2018). Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China. Abstract from The 7th International Workshop on Focused Electron Beam-Induced Processing (FEBIP), Modena, Italy.
    Zhao, Ding ; Hong, Yu ; Tiddi, William ; Elsukova, Anna ; Beleggia, Marco ; Qiu, Min ; Han, Anpan. / Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China. Abstract from The 7th International Workshop on Focused Electron Beam-Induced Processing (FEBIP), Modena, Italy.2 p.
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    title = "Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China",
    author = "Ding Zhao and Yu Hong and William Tiddi and Anna Elsukova and Marco Beleggia and Min Qiu and Anpan Han",
    year = "2018",
    language = "English",
    note = "The 7th International Workshop on Focused Electron Beam-Induced Processing (FEBIP) ; Conference date: 10-07-2018 Through 13-07-2018",
    url = "http://web.nano.cnr.it/FEBIP2018-Modena/",

    }

    Zhao, D, Hong, Y, Tiddi, W, Elsukova, A, Beleggia, M, Qiu, M & Han, A 2018, 'Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China' The 7th International Workshop on Focused Electron Beam-Induced Processing (FEBIP), Modena, Italy, 10/07/2018 - 13/07/2018, .

    Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China. / Zhao, Ding; Hong, Yu; Tiddi, William; Elsukova, Anna; Beleggia, Marco; Qiu, Min; Han, Anpan.

    2018. Abstract from The 7th International Workshop on Focused Electron Beam-Induced Processing (FEBIP), Modena, Italy.

    Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

    TY - ABST

    T1 - Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China

    AU - Zhao, Ding

    AU - Hong, Yu

    AU - Tiddi, William

    AU - Elsukova, Anna

    AU - Beleggia, Marco

    AU - Qiu, Min

    AU - Han, Anpan

    PY - 2018

    Y1 - 2018

    M3 - Conference abstract for conference

    ER -

    Zhao D, Hong Y, Tiddi W, Elsukova A, Beleggia M, Qiu M et al. Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China. 2018. Abstract from The 7th International Workshop on Focused Electron Beam-Induced Processing (FEBIP), Modena, Italy.