Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China

Ding Zhao, Yu Hong, William Tiddi, Anna Elsukova, Marco Beleggia, Min Qiu, Anpan Han

    Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

    176 Downloads (Pure)
    Original languageEnglish
    Publication date2018
    Number of pages2
    Publication statusPublished - 2018
    EventThe 7th International Workshop on Focused Electron Beam-Induced Processing (FEBIP) - Modena, Italy
    Duration: 10 Jul 201813 Jul 2018
    http://web.nano.cnr.it/FEBIP2018-Modena/

    Conference

    ConferenceThe 7th International Workshop on Focused Electron Beam-Induced Processing (FEBIP)
    CountryItaly
    CityModena
    Period10/07/201813/07/2018
    Internet address

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