Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China

Ding Zhao, Yu Hong, William Tiddi, Anna Elsukova, Marco Beleggia, Min Qiu, Anpan Han

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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Original language	English
Publication date	2018
Number of pages	2
Publication status	Published - 2018
Event	The 7th International Workshop on Focused Electron Beam-Induced Processing - Modena, Italy Duration: 10 Jul 2018 → 13 Jul 2018 Conference number: 7 http://web.nano.cnr.it/FEBIP2018-Modena/

Conference	The 7th International Workshop on Focused Electron Beam-Induced Processing
Number	7
Country/Territory	Italy
City	Modena
Period	10/07/2018 → 13/07/2018
Internet address	http://web.nano.cnr.it/FEBIP2018-Modena/

Access to Document

@conference{3a534718120741bcb3bff837f529608c,

title = "Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China",

author = "Ding Zhao and Yu Hong and William Tiddi and Anna Elsukova and Marco Beleggia and Min Qiu and Anpan Han",

year = "2018",

language = "English",

note = "The 7th International Workshop on Focused Electron Beam-Induced Processing, FEBIP ; Conference date: 10-07-2018 Through 13-07-2018",

url = "http://web.nano.cnr.it/FEBIP2018-Modena/",

}

TY - ABST

T1 - Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China

AU - Zhao, Ding

AU - Hong, Yu

AU - Tiddi, William

AU - Elsukova, Anna

AU - Beleggia, Marco

AU - Qiu, Min

AU - Han, Anpan

N1 - Conference code: 7

PY - 2018

Y1 - 2018

M3 - Conference abstract for conference

T2 - The 7th International Workshop on Focused Electron Beam-Induced Processing

Y2 - 10 July 2018 through 13 July 2018

ER -