Water vapor is condensed onto a cold sample, coating it with a thin-film of ice. The ice is sensitive to electron beam lithography exposure. 10 nm ice patterns are transferred into metals by “melt-off”. Non-planar samples are coated with ice, and we pattern on cantilevers, AFM tips, and suspended nanotubes.
|Number of pages||2|
|Publication status||Published - 2015|
|Event||5th Conference on Advances in Optoelectronics and Micro/Nano-optics - Hangzhou, China|
Duration: 29 Oct 2015 → 31 Oct 2015
Conference number: 5
|Conference||5th Conference on Advances in Optoelectronics and Micro/Nano-optics|
|Period||29/10/2015 → 31/10/2015|