Abstract
Water vapor is condensed onto a cold sample, coating it with a thin-film of ice. The ice is sensitive to electron beam lithography exposure. 10 nm ice patterns are transferred into metals by “melt-off”. Non-planar samples are coated with ice, and we pattern on cantilevers, AFM tips, and suspended nanotubes.
Original language | English |
---|---|
Publication date | 2015 |
Number of pages | 2 |
Publication status | Published - 2015 |
Event | 5th Conference on Advances in Optoelectronics and Micro/Nano-optics - Hangzhou, China Duration: 29 Oct 2015 → 31 Oct 2015 Conference number: 5 |
Conference
Conference | 5th Conference on Advances in Optoelectronics and Micro/Nano-optics |
---|---|
Number | 5 |
Country/Territory | China |
City | Hangzhou |
Period | 29/10/2015 → 31/10/2015 |