Hydrogen concentration and mass density of diamondlike carbon films obtained by x-ray and neutron reflectivity

E. Findeisen, R. Feidenhans'l, Martin Etchells Vigild, K.N. Clausen, J. Bindslev Hansen, M.D. Bentzon, J.P. Goff

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    Specular reflectivity of neutrons and x rays can be used to determine the scattering length density profile of a material perpendicular to its surface. We have applied these techniques to study amorphous, diamondlike, hydrocarbon films. By the combination of these two techniques we obtain not only the mass density, but also the concentration of hydrogen, which varies in our case between 0 and 30 at.%. This method is a new and nondestructive way to determine the concentration of hydrogen within an error of less than 2 at.% in samples with sharp interfaces. It is especially suited for diamondlike carbon films.
    Original languageEnglish
    JournalJournal of Applied Physics
    Volume76
    Issue number8
    Pages (from-to)4636-4642
    ISSN0021-8979
    DOIs
    Publication statusPublished - 1994

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