Hot embossing of photonic crystal polymer structures with a high aspect ratio

Mauno Schelb, Christoph Vannahme, Alexander Kolew, Timo Mappes

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    Hot embossing is a promising approach for mass production of photonic crystal structures. This paper describes the fabrication of a replication tool for two-dimensional photonic crystal patterns and its replication in substrates of poly(methylmethacrylate) (PMMA) and cyclic olefin copolymer (COC). A nickel tool for the replication of structures with lateral dimensions of 110 nm and heights of approximately 370 nm is fabricated via electroplating of a nanostructured sample resulting in an aspect ratio of approximately 3.5. The structures are subsequently hot embossed into PMMA and COC substrates.

    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Volume21
    Issue number2
    Pages (from-to)025017
    ISSN0960-1317
    DOIs
    Publication statusPublished - 2011

    Keywords

    • Electrodeposition, electroplating
    • Photonic bandgap materials
    • Polymers, elastomers, and plastics
    • Structure of nanoscale materials

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