Homogeneity Analysis of a MEMS-based PZT Thick Film Vibration Energy Harvester Manufacturing Process

Anders Lei; Ruichao Xu; Louise M. Borregaard; Michele Guizzetti; Erik V. Thomsen; Jan Dziuban; Rafal  Walczak

doi:10.1016/j.proeng.2012.09.207

Homogeneity Analysis of a MEMS-based PZT Thick Film Vibration Energy Harvester Manufacturing Process

Anders Lei, Ruichao Xu, Louise M. Borregaard, Michele Guizzetti, Erik V. Thomsen, Jan Dziuban (Editor), Rafal Walczak (Editor)

Meggitt A/S

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

This paper presents a homogeneity analysis of a high yield wafer scale fabrication of MEMS-based unimorph silicon/PZT thick film vibration energy harvesters aimed towards vibration sources with peak vibrations in the range of around 300Hz. A wafer with a yield of 91% (41/45 devices) has been characterized. Measurements of the open circuit voltage showed a relative difference of 32.6% between the standard deviation and average. Measurements of the capacitance and resonant frequency showed a relative difference between the standard deviation and average value of 4.3% and 2.9% respectively, thus indicating that the main variation in open circuit voltage performance is caused by varying quality factor. The average resonant frequency was measured to 333Hz with a standard variation of 9.8Hz and a harvesting bandwidth of 5-10Hz. A maximum power output of 39.3μW was achieved at 1g for the best performing harvester.

Original language	English
Journal	Procedia Engineering
Volume	47
Pages (from-to)	554-557
ISSN	1877-7058
DOIs	https://doi.org/10.1016/j.proeng.2012.09.207
Publication status	Published - 2012
Event	Eurosensors 2012: 26th European Conference on Solid-State Transducers - Krakow, Poland Duration: 9 Sept 2012 → 12 Sept 2012 Conference number: 26

Conference

Conference	Eurosensors 2012
Number	26
Country/Territory	Poland
City	Krakow
Period	09/09/2012 → 12/09/2012

Keywords

Energy harvesting
Vibration harvesting
MEMS
PZT
Thick film

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@inproceedings{4fae625181c74138806dfcb73a6af52e,

title = "Homogeneity Analysis of a MEMS-based PZT Thick Film Vibration Energy Harvester Manufacturing Process",

abstract = "This paper presents a homogeneity analysis of a high yield wafer scale fabrication of MEMS-based unimorph silicon/PZT thick film vibration energy harvesters aimed towards vibration sources with peak vibrations in the range of around 300Hz. A wafer with a yield of 91% (41/45 devices) has been characterized. Measurements of the open circuit voltage showed a relative difference of 32.6% between the standard deviation and average. Measurements of the capacitance and resonant frequency showed a relative difference between the standard deviation and average value of 4.3% and 2.9% respectively, thus indicating that the main variation in open circuit voltage performance is caused by varying quality factor. The average resonant frequency was measured to 333Hz with a standard variation of 9.8Hz and a harvesting bandwidth of 5-10Hz. A maximum power output of 39.3μW was achieved at 1g for the best performing harvester.",

keywords = "Energy harvesting, Vibration harvesting, MEMS, PZT, Thick film",

author = "Anders Lei and Ruichao Xu and Borregaard, {Louise M.} and Michele Guizzetti and Thomsen, {Erik V.} and Jan Dziuban and Rafal Walczak",

year = "2012",

doi = "10.1016/j.proeng.2012.09.207",

language = "English",

volume = "47",

pages = "554--557",

journal = "Procedia Engineering",

issn = "1877-7058",

publisher = "Elsevier",

note = "Eurosensors 2012 : 26th European Conference on Solid-State Transducers ; Conference date: 09-09-2012 Through 12-09-2012",

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TY - GEN

T1 - Homogeneity Analysis of a MEMS-based PZT Thick Film Vibration Energy Harvester Manufacturing Process

AU - Lei, Anders

AU - Xu, Ruichao

AU - Borregaard, Louise M.

AU - Guizzetti, Michele

AU - Thomsen, Erik V.

A2 - Dziuban, Jan

A2 - Walczak, Rafal

N1 - Conference code: 26

PY - 2012

Y1 - 2012

N2 - This paper presents a homogeneity analysis of a high yield wafer scale fabrication of MEMS-based unimorph silicon/PZT thick film vibration energy harvesters aimed towards vibration sources with peak vibrations in the range of around 300Hz. A wafer with a yield of 91% (41/45 devices) has been characterized. Measurements of the open circuit voltage showed a relative difference of 32.6% between the standard deviation and average. Measurements of the capacitance and resonant frequency showed a relative difference between the standard deviation and average value of 4.3% and 2.9% respectively, thus indicating that the main variation in open circuit voltage performance is caused by varying quality factor. The average resonant frequency was measured to 333Hz with a standard variation of 9.8Hz and a harvesting bandwidth of 5-10Hz. A maximum power output of 39.3μW was achieved at 1g for the best performing harvester.

AB - This paper presents a homogeneity analysis of a high yield wafer scale fabrication of MEMS-based unimorph silicon/PZT thick film vibration energy harvesters aimed towards vibration sources with peak vibrations in the range of around 300Hz. A wafer with a yield of 91% (41/45 devices) has been characterized. Measurements of the open circuit voltage showed a relative difference of 32.6% between the standard deviation and average. Measurements of the capacitance and resonant frequency showed a relative difference between the standard deviation and average value of 4.3% and 2.9% respectively, thus indicating that the main variation in open circuit voltage performance is caused by varying quality factor. The average resonant frequency was measured to 333Hz with a standard variation of 9.8Hz and a harvesting bandwidth of 5-10Hz. A maximum power output of 39.3μW was achieved at 1g for the best performing harvester.

KW - Energy harvesting

KW - Vibration harvesting

KW - MEMS

KW - PZT

KW - Thick film

U2 - 10.1016/j.proeng.2012.09.207

DO - 10.1016/j.proeng.2012.09.207

M3 - Conference article

SN - 1877-7058

VL - 47

SP - 554

EP - 557

JO - Procedia Engineering

JF - Procedia Engineering

T2 - Eurosensors 2012

Y2 - 9 September 2012 through 12 September 2012

ER -

Homogeneity Analysis of a MEMS-based PZT Thick Film Vibration Energy Harvester Manufacturing Process

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