Hollow core MOEMS Bragg grating microphone for distributed and remote sensing

Kasper Reck; Christian Østergaard; Erik Vilain Thomsen; Ole Hansen

doi:10.1109/TRANSDUCERS.2011.5969722

Hollow core MOEMS Bragg grating microphone for distributed and remote sensing

Kasper Reck, Christian Østergaard, Erik Vilain Thomsen, Ole Hansen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

We present the design and fabrication of a completely new high sensitivity all-optical frequency modulated MOEMS microphone for distributed and remote sensing applications. Due to immunity to electromagnetic interference, no parasitic capacitances and easy wavelength division multiplexing (WDM) combined with the low transmission loss of modern optical fibers [1], frequency modulated optical sensors are ideal for remote and distributed sensing. While several all-optical and high sensitivity MOEMS pressure sensors are found in literature, these sensors are typically based on amplitude (intensity) modulation. Amplitude modulation is inherently sensitive to transmission loss and requires a unique transmission line for each sensor. Though fiber Bragg gratings (FBGs) are based on frequency modulation the relatively large dimensions of optical fibers and their low refractive index modulation makes them most suitable for high stress sensing, e.g. in structural health monitoring. The MOEMS microphone presented here has a calculated static pressure sensitivity approximately 104 times larger than conventional FBGs [2,3].

Original language	English
Title of host publication	TRANSDUCERS 2011 : 16th International Solid-State Sensors, Actuators and Microsystems Conference
Publisher	IEEE
Publication date	2011
Pages	M3P.143
ISBN (Print)	978-1-4577-0157-3
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969722
Publication status	Published - 2011
Event	16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011 Conference number: 16 http://www.transducers11-beijing.org/

Conference

Conference	16th International Solid-State Sensors, Actuators and Microsystems Conference
Number	16
Country/Territory	China
City	Beijing
Period	05/06/2011 → 09/06/2011
Internet address	http://www.transducers11-beijing.org/

Keywords

Optical waveguides
Bragg gratings
Optical fiber sensors
Temperature sensors
Refractive index

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10.1109/TRANSDUCERS.2011.5969722

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title = "Hollow core MOEMS Bragg grating microphone for distributed and remote sensing",

abstract = "We present the design and fabrication of a completely new high sensitivity all-optical frequency modulated MOEMS microphone for distributed and remote sensing applications. Due to immunity to electromagnetic interference, no parasitic capacitances and easy wavelength division multiplexing (WDM) combined with the low transmission loss of modern optical fibers [1], frequency modulated optical sensors are ideal for remote and distributed sensing. While several all-optical and high sensitivity MOEMS pressure sensors are found in literature, these sensors are typically based on amplitude (intensity) modulation. Amplitude modulation is inherently sensitive to transmission loss and requires a unique transmission line for each sensor. Though fiber Bragg gratings (FBGs) are based on frequency modulation the relatively large dimensions of optical fibers and their low refractive index modulation makes them most suitable for high stress sensing, e.g. in structural health monitoring. The MOEMS microphone presented here has a calculated static pressure sensitivity approximately 104 times larger than conventional FBGs [2,3].",

keywords = "Optical waveguides, Bragg gratings, Optical fiber sensors, Temperature sensors, Refractive index",

author = "Kasper Reck and Christian {\O}stergaard and Thomsen, {Erik Vilain} and Ole Hansen",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969722",

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pages = "M3P.143",

booktitle = "TRANSDUCERS 2011",

publisher = "IEEE",

address = "United States",

note = "16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

url = "http://www.transducers11-beijing.org/",

}

Reck, K, Østergaard, C, Thomsen, EV & Hansen, O 2011, Hollow core MOEMS Bragg grating microphone for distributed and remote sensing. in TRANSDUCERS 2011: 16th International Solid-State Sensors, Actuators and Microsystems Conference. IEEE, pp. M3P.143, 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China, 05/06/2011. https://doi.org/10.1109/TRANSDUCERS.2011.5969722

Hollow core MOEMS Bragg grating microphone for distributed and remote sensing. / Reck, Kasper; Østergaard, Christian; Thomsen, Erik Vilain et al.
TRANSDUCERS 2011: 16th International Solid-State Sensors, Actuators and Microsystems Conference. IEEE, 2011. p. M3P.143.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Hollow core MOEMS Bragg grating microphone for distributed and remote sensing

AU - Reck, Kasper

AU - Østergaard, Christian

AU - Thomsen, Erik Vilain

AU - Hansen, Ole

N1 - Conference code: 16

PY - 2011

Y1 - 2011

N2 - We present the design and fabrication of a completely new high sensitivity all-optical frequency modulated MOEMS microphone for distributed and remote sensing applications. Due to immunity to electromagnetic interference, no parasitic capacitances and easy wavelength division multiplexing (WDM) combined with the low transmission loss of modern optical fibers [1], frequency modulated optical sensors are ideal for remote and distributed sensing. While several all-optical and high sensitivity MOEMS pressure sensors are found in literature, these sensors are typically based on amplitude (intensity) modulation. Amplitude modulation is inherently sensitive to transmission loss and requires a unique transmission line for each sensor. Though fiber Bragg gratings (FBGs) are based on frequency modulation the relatively large dimensions of optical fibers and their low refractive index modulation makes them most suitable for high stress sensing, e.g. in structural health monitoring. The MOEMS microphone presented here has a calculated static pressure sensitivity approximately 104 times larger than conventional FBGs [2,3].

AB - We present the design and fabrication of a completely new high sensitivity all-optical frequency modulated MOEMS microphone for distributed and remote sensing applications. Due to immunity to electromagnetic interference, no parasitic capacitances and easy wavelength division multiplexing (WDM) combined with the low transmission loss of modern optical fibers [1], frequency modulated optical sensors are ideal for remote and distributed sensing. While several all-optical and high sensitivity MOEMS pressure sensors are found in literature, these sensors are typically based on amplitude (intensity) modulation. Amplitude modulation is inherently sensitive to transmission loss and requires a unique transmission line for each sensor. Though fiber Bragg gratings (FBGs) are based on frequency modulation the relatively large dimensions of optical fibers and their low refractive index modulation makes them most suitable for high stress sensing, e.g. in structural health monitoring. The MOEMS microphone presented here has a calculated static pressure sensitivity approximately 104 times larger than conventional FBGs [2,3].

KW - Optical waveguides

KW - Bragg gratings

KW - Optical fiber sensors

KW - Temperature sensors

KW - Refractive index

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M3 - Article in proceedings

SN - 978-1-4577-0157-3

SP - M3P.143

BT - TRANSDUCERS 2011

PB - IEEE

T2 - 16th International Solid-State Sensors, Actuators and Microsystems Conference

Y2 - 5 June 2011 through 9 June 2011

ER -

Hollow core MOEMS Bragg grating microphone for distributed and remote sensing

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Keywords

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