Hollow core MOEMS Bragg grating microphone for distributed and remote sensing

Kasper Reck, Christian Østergaard, Erik Vilain Thomsen, Ole Hansen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    We present the design and fabrication of a completely new high sensitivity all-optical frequency modulated MOEMS microphone for distributed and remote sensing applications. Due to immunity to electromagnetic interference, no parasitic capacitances and easy wavelength division multiplexing (WDM) combined with the low transmission loss of modern optical fibers [1], frequency modulated optical sensors are ideal for remote and distributed sensing. While several all-optical and high sensitivity MOEMS pressure sensors are found in literature, these sensors are typically based on amplitude (intensity) modulation. Amplitude modulation is inherently sensitive to transmission loss and requires a unique transmission line for each sensor. Though fiber Bragg gratings (FBGs) are based on frequency modulation the relatively large dimensions of optical fibers and their low refractive index modulation makes them most suitable for high stress sensing, e.g. in structural health monitoring. The MOEMS microphone presented here has a calculated static pressure sensitivity approximately 104 times larger than conventional FBGs [2,3].
    Original languageEnglish
    Title of host publicationTRANSDUCERS 2011 : 16th International Solid-State Sensors, Actuators and Microsystems Conference
    PublisherIEEE
    Publication date2011
    PagesM3P.143
    ISBN (Print)978-1-4577-0157-3
    DOIs
    Publication statusPublished - 2011
    Event16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China
    Duration: 5 Jun 20119 Jun 2011
    Conference number: 16
    http://www.transducers11-beijing.org/

    Conference

    Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
    Number16
    CountryChina
    CityBeijing
    Period05/06/201109/06/2011
    Internet address

    Keywords

    • Optical waveguides
    • Bragg gratings
    • Optical fiber sensors
    • Temperature sensors
    • Refractive index

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