Abstract
Summarising, piezoresistive accelerometers can have a high dynamic range, in combination with a sufficiently high resonance frequency for modal analysis applications. The resolution that can be obtained in practice is expected to be sufficient, when using a low noise measurement amplifier, that can handle the DC response of the accelerometer. A drawback of piezoresistive detection is the temperature sensitivity, although effective temperature compensation schemes have been developed.
| Original language | English |
|---|---|
| Journal | IEEJ Transactions on Sensors and Micromachines |
| Volume | 116 |
| Issue number | 7 |
| Pages (from-to) | 256-267 |
| ISSN | 1341-8939 |
| DOIs | |
| Publication status | Published - 1996 |