Highly Reliable 0-ring Packaging Cencept for MEMS Pressure Sensors

Casper Pedersen; Simon Tage Jespersen; K. W. Jacobsen; J. P Krog; Carsten Christensen; Erik Vilain Thomsen

Highly Reliable 0-ring Packaging Cencept for MEMS Pressure Sensors

Casper Pedersen
, Simon Tage Jespersen
, K. W. Jacobsen
, J. P Krog
, Carsten Christensen
, Erik Vilain Thomsen

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Sensors and Actuators A 115
Pages (from-to)	617-627
Publication status	Published - 2004

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@article{b081269dfdef4755b980fbd115b4e9a7,

title = "Highly Reliable 0-ring Packaging Cencept for MEMS Pressure Sensors",

author = "Casper Pedersen and Jespersen, \{Simon Tage\} and Jacobsen, \{K. W.\} and Krog, \{J. P\} and Carsten Christensen and Thomsen, \{Erik Vilain\}",

year = "2004",

language = "English",

pages = "617--627",

journal = "Sensors and Actuators A 115",

issn = "1873-3069",

publisher = "Elsevier",

}