Highly Reliable 0-ring Packaging Cencept for MEMS Pressure Sensors

Casper Pedersen, Simon Tage Jespersen, K. W. Jacobsen, J. P Krog, Carsten Christensen, Erik Vilain Thomsen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalSensors and Actuators A 115
    Pages (from-to)617-627
    Publication statusPublished - 2004

    Cite this

    Pedersen, C., Jespersen, S. T., Jacobsen, K. W., Krog, J. P., Christensen, C., & Thomsen, E. V. (2004). Highly Reliable 0-ring Packaging Cencept for MEMS Pressure Sensors. Sensors and Actuators A 115, 617-627.
    Pedersen, Casper ; Jespersen, Simon Tage ; Jacobsen, K. W. ; Krog, J. P ; Christensen, Carsten ; Thomsen, Erik Vilain. / Highly Reliable 0-ring Packaging Cencept for MEMS Pressure Sensors. In: Sensors and Actuators A 115. 2004 ; pp. 617-627.
    @article{b081269dfdef4755b980fbd115b4e9a7,
    title = "Highly Reliable 0-ring Packaging Cencept for MEMS Pressure Sensors",
    author = "Casper Pedersen and Jespersen, {Simon Tage} and Jacobsen, {K. W.} and Krog, {J. P} and Carsten Christensen and Thomsen, {Erik Vilain}",
    year = "2004",
    language = "English",
    pages = "617--627",
    journal = "Sensors and Actuators A: Physical",
    issn = "0924-4247",
    publisher = "Elsevier",

    }

    Pedersen, C, Jespersen, ST, Jacobsen, KW, Krog, JP, Christensen, C & Thomsen, EV 2004, 'Highly Reliable 0-ring Packaging Cencept for MEMS Pressure Sensors', Sensors and Actuators A 115, pp. 617-627.

    Highly Reliable 0-ring Packaging Cencept for MEMS Pressure Sensors. / Pedersen, Casper; Jespersen, Simon Tage; Jacobsen, K. W.; Krog, J. P; Christensen, Carsten; Thomsen, Erik Vilain.

    In: Sensors and Actuators A 115, 2004, p. 617-627.

    Research output: Contribution to journalJournal articleResearchpeer-review

    TY - JOUR

    T1 - Highly Reliable 0-ring Packaging Cencept for MEMS Pressure Sensors

    AU - Pedersen, Casper

    AU - Jespersen, Simon Tage

    AU - Jacobsen, K. W.

    AU - Krog, J. P

    AU - Christensen, Carsten

    AU - Thomsen, Erik Vilain

    PY - 2004

    Y1 - 2004

    M3 - Journal article

    SP - 617

    EP - 627

    JO - Sensors and Actuators A: Physical

    JF - Sensors and Actuators A: Physical

    SN - 0924-4247

    ER -

    Pedersen C, Jespersen ST, Jacobsen KW, Krog JP, Christensen C, Thomsen EV. Highly Reliable 0-ring Packaging Cencept for MEMS Pressure Sensors. Sensors and Actuators A 115. 2004;617-627.