Highly Reliable 0-ring Packaging Cencept for MEMS Pressure Sensors

Casper Pedersen, Simon Tage Jespersen, K. W. Jacobsen, J. P Krog, Carsten Christensen, Erik Vilain Thomsen

Research output: Contribution to journal › Journal article › Research › peer-review

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@article{b081269dfdef4755b980fbd115b4e9a7,

title = "Highly Reliable 0-ring Packaging Cencept for MEMS Pressure Sensors",

author = "Casper Pedersen and Jespersen, {Simon Tage} and Jacobsen, {K. W.} and Krog, {J. P} and Carsten Christensen and Thomsen, {Erik Vilain}",

year = "2004",

language = "English",

pages = "617--627",

journal = "Sensors and Actuators A 115",

issn = "1873-3069",

publisher = "Elsevier",

}