Abstract
We report the synthesis by reactive magnetron sputtering and structural characterization of highly (111)-oriented thin films of δ–Bi2O3. This phase is obtained at a substrate temperature of 150–200 °C in a narrow window of O2/Ar ratio in the sputtering gas (18%–20%). Transmission electron microscopy and x-ray diffraction reveal a polycrystalline columnar structure with (111) texture. The films are stable from room temperature up to 250 °C in vacuum and 350 °C in ambient air. © 2013 American Institute of Physics
Original language | English |
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Article number | 046101 |
Journal | Journal of Applied Physics |
Volume | 113 |
Number of pages | 3 |
ISSN | 0021-8979 |
DOIs | |
Publication status | Published - 2013 |