Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics

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Fabrication of large area metamaterial structures in a reproducible manner is a tremendous challenge. Here, we realize the fabrication of plasmonic metamaterials for the mid-infrared wavelength region composed of Al-doped ZnO (AZO) pillars by a combination of atomic layer deposition and reactive ion etching.
Original languageEnglish
Publication date2017
Number of pages1
Publication statusPublished - 2017
Event8th International Conference on Surface Plasmon Photonics - Academia Sinica, Taipei, Taiwan, Province of China
Duration: 22 May 201726 May 2017

Conference

Conference8th International Conference on Surface Plasmon Photonics
LocationAcademia Sinica
CountryTaiwan, Province of China
CityTaipei
Period22/05/201726/05/2017
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