Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics

Evgeniy Shkondin, Osamu Takayama, Mohammad Esmail Aryaee Panah, Pei Liu, Pernille Voss Larsen, Mikkel Dysseholm Mar, Flemming Jensen, Andrei Lavrinenko

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Abstract

Fabrication of large area metamaterial structures in a reproducible manner is a tremendous challenge. Here, we realize the fabrication of plasmonic metamaterials for the mid-infrared wavelength region composed of Al-doped ZnO (AZO) pillars by a combination of atomic layer deposition and reactive ion etching.
Original languageEnglish
Publication date2017
Number of pages1
Publication statusPublished - 2017
Event8th International Conference on Surface Plasmon Photonics - Academia Sinica, Taipei, Taiwan, Province of China
Duration: 22 May 201726 May 2017

Conference

Conference8th International Conference on Surface Plasmon Photonics
LocationAcademia Sinica
CountryTaiwan, Province of China
CityTaipei
Period22/05/201726/05/2017

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Cite this

Shkondin, E., Takayama, O., Panah, M. E. A., Liu, P., Larsen, P. V., Mar, M. D., Jensen, F., & Lavrinenko, A. (2017). Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics. Abstract from 8th International Conference on Surface Plasmon Photonics, Taipei, Taiwan, Province of China.