Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics

Evgeniy Shkondin, Osamu Takayama, Mohammad Esmail Aryaee Panah, Pei Liu, Pernille Voss Larsen, Mikkel Dysseholm Mar, Flemming Jensen, Andrei Lavrinenko

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

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Abstract

Fabrication of large area metamaterial structures in a reproducible manner is a tremendous challenge. Here, we realize the fabrication of plasmonic metamaterials for the mid-infrared wavelength region composed of Al-doped ZnO (AZO) pillars by a combination of atomic layer deposition and reactive ion etching.
Original languageEnglish
Publication date2017
Number of pages1
Publication statusPublished - 2017
Event8th International Conference on Surface Plasmon Photonics - Academia Sinica, Taipei, Taiwan, Province of China
Duration: 22 May 201726 May 2017

Conference

Conference8th International Conference on Surface Plasmon Photonics
LocationAcademia Sinica
CountryTaiwan, Province of China
CityTaipei
Period22/05/201726/05/2017

Cite this

Shkondin, E., Takayama, O., Panah, M. E. A., Liu, P., Larsen, P. V., Mar, M. D., ... Lavrinenko, A. (2017). Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics. Abstract from 8th International Conference on Surface Plasmon Photonics, Taipei, Taiwan, Province of China.
Shkondin, Evgeniy ; Takayama, Osamu ; Panah, Mohammad Esmail Aryaee ; Liu, Pei ; Larsen, Pernille Voss ; Mar, Mikkel Dysseholm ; Jensen, Flemming ; Lavrinenko, Andrei. / Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics. Abstract from 8th International Conference on Surface Plasmon Photonics, Taipei, Taiwan, Province of China.1 p.
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title = "Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics",
abstract = "Fabrication of large area metamaterial structures in a reproducible manner is a tremendous challenge. Here, we realize the fabrication of plasmonic metamaterials for the mid-infrared wavelength region composed of Al-doped ZnO (AZO) pillars by a combination of atomic layer deposition and reactive ion etching.",
author = "Evgeniy Shkondin and Osamu Takayama and Panah, {Mohammad Esmail Aryaee} and Pei Liu and Larsen, {Pernille Voss} and Mar, {Mikkel Dysseholm} and Flemming Jensen and Andrei Lavrinenko",
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note = "8th International Conference on Surface Plasmon Photonics, SPP8 ; Conference date: 22-05-2017 Through 26-05-2017",

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Shkondin, E, Takayama, O, Panah, MEA, Liu, P, Larsen, PV, Mar, MD, Jensen, F & Lavrinenko, A 2017, 'Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics' 8th International Conference on Surface Plasmon Photonics, Taipei, Taiwan, Province of China, 22/05/2017 - 26/05/2017, .

Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics. / Shkondin, Evgeniy; Takayama, Osamu; Panah, Mohammad Esmail Aryaee; Liu, Pei; Larsen, Pernille Voss; Mar, Mikkel Dysseholm; Jensen, Flemming; Lavrinenko, Andrei.

2017. Abstract from 8th International Conference on Surface Plasmon Photonics, Taipei, Taiwan, Province of China.

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

TY - ABST

T1 - Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics

AU - Shkondin, Evgeniy

AU - Takayama, Osamu

AU - Panah, Mohammad Esmail Aryaee

AU - Liu, Pei

AU - Larsen, Pernille Voss

AU - Mar, Mikkel Dysseholm

AU - Jensen, Flemming

AU - Lavrinenko, Andrei

PY - 2017

Y1 - 2017

N2 - Fabrication of large area metamaterial structures in a reproducible manner is a tremendous challenge. Here, we realize the fabrication of plasmonic metamaterials for the mid-infrared wavelength region composed of Al-doped ZnO (AZO) pillars by a combination of atomic layer deposition and reactive ion etching.

AB - Fabrication of large area metamaterial structures in a reproducible manner is a tremendous challenge. Here, we realize the fabrication of plasmonic metamaterials for the mid-infrared wavelength region composed of Al-doped ZnO (AZO) pillars by a combination of atomic layer deposition and reactive ion etching.

M3 - Conference abstract for conference

ER -

Shkondin E, Takayama O, Panah MEA, Liu P, Larsen PV, Mar MD et al. Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics. 2017. Abstract from 8th International Conference on Surface Plasmon Photonics, Taipei, Taiwan, Province of China.