Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials  for mid-infrared plasmonics

Evgeniy Shkondin; Osamu Takayama; Mohammad Esmail Aryaee Panah; Pei Liu; Pernille Voss Larsen; Mikkel Dysseholm Mar; Flemming Jensen; Andrei Lavrinenko

Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics

Evgeniy Shkondin, Osamu Takayama, Mohammad Esmail Aryaee Panah, Pei Liu, Pernille Voss Larsen, Mikkel Dysseholm Mar, Flemming Jensen, Andrei Lavrinenko

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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Abstract

Fabrication of large area metamaterial structures in a reproducible manner is a tremendous challenge. Here, we realize the fabrication of plasmonic metamaterials for the mid-infrared wavelength region composed of Al-doped ZnO (AZO) pillars by a combination of atomic layer deposition and reactive ion etching.

Original language	English
Publication date	2017
Number of pages	1
Publication status	Published - 2017
Event	8^th International Conference on Surface Plasmon Photonics - Academia Sinica, Taipei, Taiwan, Province of China Duration: 22 May 2017 → 26 May 2017 Conference number: 8

Conference

Conference	8^th International Conference on Surface Plasmon Photonics
Number	8
Location	Academia Sinica
Country/Territory	Taiwan, Province of China
City	Taipei
Period	22/05/2017 → 26/05/2017

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Sibolt et al Auto 4DMC workflow IC3DDose 2017 J Phys Conf SeFinal published version, 158 KB

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DarkSILD: Dark-field hyperlens: Superresolution imaging and label-free sensing device for biological applications
Laurynenka, A. (Project Manager), Novitsky, A. (Project Participant), Takayama, O. (Project Participant), Shkondin, E. (Project Participant) & Repän, T. (PhD Student)
01/06/2016 → 06/09/2019
Project: Research

Cite this

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title = "Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics",

abstract = "Fabrication of large area metamaterial structures in a reproducible manner is a tremendous challenge. Here, we realize the fabrication of plasmonic metamaterials for the mid-infrared wavelength region composed of Al-doped ZnO (AZO) pillars by a combination of atomic layer deposition and reactive ion etching.",

author = "Evgeniy Shkondin and Osamu Takayama and Panah, {Mohammad Esmail Aryaee} and Pei Liu and Larsen, {Pernille Voss} and Mar, {Mikkel Dysseholm} and Flemming Jensen and Andrei Lavrinenko",

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Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics. / Shkondin, Evgeniy ; Takayama, Osamu; Panah, Mohammad Esmail Aryaee et al.
2017. Abstract from 8^th International Conference on Surface Plasmon Photonics, Taipei, Taiwan, Province of China.

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

TY - ABST

T1 - Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics

AU - Shkondin, Evgeniy

AU - Takayama, Osamu

AU - Panah, Mohammad Esmail Aryaee

AU - Liu, Pei

AU - Larsen, Pernille Voss

AU - Mar, Mikkel Dysseholm

AU - Jensen, Flemming

AU - Lavrinenko, Andrei

N1 - Conference code: 8

PY - 2017

Y1 - 2017

N2 - Fabrication of large area metamaterial structures in a reproducible manner is a tremendous challenge. Here, we realize the fabrication of plasmonic metamaterials for the mid-infrared wavelength region composed of Al-doped ZnO (AZO) pillars by a combination of atomic layer deposition and reactive ion etching.

AB - Fabrication of large area metamaterial structures in a reproducible manner is a tremendous challenge. Here, we realize the fabrication of plasmonic metamaterials for the mid-infrared wavelength region composed of Al-doped ZnO (AZO) pillars by a combination of atomic layer deposition and reactive ion etching.

M3 - Conference abstract for conference

T2 - 8<sup>th</sup> International Conference on Surface Plasmon Photonics

Y2 - 22 May 2017 through 26 May 2017

ER -

Highly ordered Al-doped ZnO nano-pillar and tube structures as hyperbolic metamaterials for mid-infrared plasmonics

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Conference

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DarkSILD: Dark-field hyperlens: Superresolution imaging and label-free sensing device for biological applications

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