High throughput soft embossing process for micro-patterning of PEDOT thin films

Paola Fanzio, Alberto Cagliani, Kristof G. Peterffy, Luigi Sasso

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    The patterning of conductive polymers is a major challenge in the implementation of these materials in several research and industrial applications, spanning from photovoltaics to biosensors. Within this context, we have developed a reliable technique to pattern a thin layer of the conductive polymer poly(3,4-ethylenedioxythiophene) (PEDOT) by means of a low cost and high throughput soft embossing process. We were able to reproduce a functional conductive pattern with a minimum dimension of 1 μm and to fabricate electrically decoupled electrodes. Moreover, the conductivity of the PEDOT films has been characterized, finding that a post-processing treatment with Ethylene Glycol allows an increase in conductivity and a decrease in water solubility of the PEDOT film. Finally, cyclic voltammetry demonstrates that the post-treatment also ensures the electrochemical activity of the film. Our technology offers a facile solution for the patterning of organic conductors with resolution in the micro scale, and can be the basis for the realization and development of polymeric microdevices with electrical and electrochemical functionalities.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume176
    Pages (from-to)15-21
    Number of pages7
    ISSN0167-9317
    DOIs
    Publication statusPublished - 2017

    Keywords

    • Conductivity
    • Ethylene glycol
    • Micro-patterning
    • PEDOT
    • Soft electrodes
    • Soft embossing

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