High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts

Daniel Southcott Engstrøm, Veronica Savu, Xueni Zhu, Ian Y. Y. Bu, William I. Milne, Jürgen Brugger, Peter Bøggild

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    A new and versatile technique for the wafer scale nanofabrication of silicon nanowire (SiNW) and multiwalled carbon nanotube (MWNT) tips on atomic force microscope (AFM) probes is presented. Catalyst material for the SiNW and MWNT growth was deposited on prefabricated AFM probes using aligned wafer scale nanostencil lithography. Individual vertical SiNWs were grown epitaxially by a catalytic vapor−liquid−solid (VLS) process and MWNTs were grown by a plasma-enhanced chemical vapor (PECVD) process on the AFM probes. The AFM probes were tested for imaging micrometers-deep trenches, where they demonstrated a significantly better performance than commercial high aspect ratio tips. Our method demonstrates a reliable and cost-efficient route toward wafer scale manufacturing of SiNW and MWNT AFM probes.
    Original languageEnglish
    JournalNano Letters
    Volume11
    Issue number4
    Pages (from-to)1568-1574
    ISSN1530-6984
    DOIs
    Publication statusPublished - 2011

    Keywords

    • carbon nanotubes
    • high aspect ratio
    • AFM
    • Nanostencil
    • silicon nanowires

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