High-Temperature Compatible Nickel Silicide Thermometer And Heater For Catalytic Chemical Microreactors

Søren Jensen, U.J. Quaade, Ole Hansen

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

Integration of heaters and thermometers is important for agile and accurate control and measurement of the thermal reaction conditions in microfabricated chemical reactors (microreactors). This paper describes development and operation of nickel silicide heaters and temperature sensors for temperatures exceeding 700 °C. The heaters and thermometers are integrated with chemical microreactors for heterogeneous catalytic conversion of gasses, and thermally activated catalytic conversion of CO to CO2 in the reactors is demonstrated. The heaters and thermometers are shown to be compatible with operation temperatures exceeding 700 °C.
Original languageEnglish
Title of host publicationProceedings of the 18th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2005. January 30 - February 3
PublisherIEEE
Publication date2005
Pages463-466
ISBN (Print)0-7803-8732-5
DOIs
Publication statusPublished - 2005
Event18th IEEE International Conference on Micro Electro Mechanical Systems - Miami Beach, FL, United States
Duration: 30 Jan 20053 Feb 2005
Conference number: 18

Conference

Conference18th IEEE International Conference on Micro Electro Mechanical Systems
Number18
CountryUnited States
CityMiami Beach, FL
Period30/01/200503/02/2005

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