High Sensitivity Spectroscopic Measurement with a Highly Nonlinear THz-PMT and an is-TPG

Naoya Kawai; Hisanari Takahashi; Kota Katsuyama; Yuma Takida; Tobias Olaf Buchmann; Matej Sebek; Simon Jappe Lange; Peter Uhd Jepsen; Hiroaki Minamide; Hiroshi Satozono; Takayuki Ohmura

doi:10.1109/IRMMW-THz57677.2023.10298855

High Sensitivity Spectroscopic Measurement with a Highly Nonlinear THz-PMT and an is-TPG

Naoya Kawai
, Hisanari Takahashi
, Kota Katsuyama
, Yuma Takida
, Tobias Olaf Buchmann
, Matej Sebek
, Simon Jappe Lange
, Peter Uhd Jepsen
, Hiroaki Minamide
, Hiroshi Satozono
, Takayuki Ohmura

Hamamatsu Photonics K.K.
RIKEN Center for Integrative Medical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

We use an injection-seeded terahertz (THz)-wave Parametric Generator (is-TPG) source with a THz-PMT detector for spectroscopic measurements on water vapor concentration in air and doping levels of semiconductor wafers. The THz-PMT detector has a highly non-linear response to changes in the electric field strength from the is-TPG source, which allows for precise characterization of miniscule changes in the absorption spectrum. We perform a frequency sweep from 0.7 to 1.2 THz and show that our THz-PMT signal drops significantly at water vapor absorption lines. In addition, we measure changes in the carrier density of Si wafers through reflection mode measurements. This proposed technique, operated with our novel THz instrumentation, is expected to enable highly sensitive and high-speed spectroscopic measurements.

Original language	English
Title of host publication	Proceedings of 48^th International Conference on Infrared, Millimeter, and Terahertz Waves
Number of pages	2
Publisher	IEEE
Publication date	22 Sept 2023
Article number	10298855
ISBN (Print)	979-8-3503-3661-0
DOIs	https://doi.org/10.1109/IRMMW-THz57677.2023.10298855
Publication status	Published - 22 Sept 2023
Event	48^th International Conference on Infrared, Millimeter, and Terahertz Waves - Montreal, Canada Duration: 17 Sept 2023 → 22 Sept 2023

Conference

Conference	48^th International Conference on Infrared, Millimeter, and Terahertz Waves
Country/Territory	Canada
City	Montreal
Period	17/09/2023 → 22/09/2023

Keywords

Semiconductor device measurement
Sensitivity
Density measurement
Absorption
Instruments
Detectors
Silicon

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10.1109/IRMMW-THz57677.2023.10298855

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Kawai, N., Takahashi, H., Katsuyama, K., Takida, Y., Buchmann, T. O., Sebek, M., Lange, S. J., Jepsen, P. U., Minamide, H., Satozono, H., & Ohmura, T. (2023). High Sensitivity Spectroscopic Measurement with a Highly Nonlinear THz-PMT and an is-TPG. In Proceedings of 48^th International Conference on Infrared, Millimeter, and Terahertz Waves Article 10298855 IEEE. https://doi.org/10.1109/IRMMW-THz57677.2023.10298855

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title = "High Sensitivity Spectroscopic Measurement with a Highly Nonlinear THz-PMT and an is-TPG",

abstract = "We use an injection-seeded terahertz (THz)-wave Parametric Generator (is-TPG) source with a THz-PMT detector for spectroscopic measurements on water vapor concentration in air and doping levels of semiconductor wafers. The THz-PMT detector has a highly non-linear response to changes in the electric field strength from the is-TPG source, which allows for precise characterization of miniscule changes in the absorption spectrum. We perform a frequency sweep from 0.7 to 1.2 THz and show that our THz-PMT signal drops significantly at water vapor absorption lines. In addition, we measure changes in the carrier density of Si wafers through reflection mode measurements. This proposed technique, operated with our novel THz instrumentation, is expected to enable highly sensitive and high-speed spectroscopic measurements.",

keywords = "Semiconductor device measurement, Sensitivity, Density measurement, Absorption, Instruments, Detectors, Silicon",

author = "Naoya Kawai and Hisanari Takahashi and Kota Katsuyama and Yuma Takida and Buchmann, \{Tobias Olaf\} and Matej Sebek and Lange, \{Simon Jappe\} and Jepsen, \{Peter Uhd\} and Hiroaki Minamide and Hiroshi Satozono and Takayuki Ohmura",

year = "2023",

month = sep,

day = "22",

doi = "10.1109/IRMMW-THz57677.2023.10298855",

language = "English",

isbn = "979-8-3503-3661-0",

booktitle = "Proceedings of 48th International Conference on Infrared, Millimeter, and Terahertz Waves",

publisher = "IEEE",

address = "United States",

note = "48<sup>th</sup> International Conference on Infrared, Millimeter, and Terahertz Waves, 2023 IRMMW-THz ; Conference date: 17-09-2023 Through 22-09-2023",

}

Kawai, N, Takahashi, H, Katsuyama, K, Takida, Y, Buchmann, TO, Sebek, M, Lange, SJ , Jepsen, PU, Minamide, H, Satozono, H & Ohmura, T 2023, High Sensitivity Spectroscopic Measurement with a Highly Nonlinear THz-PMT and an is-TPG. in Proceedings of 48^th International Conference on Infrared, Millimeter, and Terahertz Waves., 10298855, IEEE, 48^th International Conference on Infrared, Millimeter, and Terahertz Waves, Montreal, Quebec, Canada, 17/09/2023. https://doi.org/10.1109/IRMMW-THz57677.2023.10298855

High Sensitivity Spectroscopic Measurement with a Highly Nonlinear THz-PMT and an is-TPG. / Kawai, Naoya; Takahashi, Hisanari; Katsuyama, Kota et al.
Proceedings of 48^th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE, 2023. 10298855.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - High Sensitivity Spectroscopic Measurement with a Highly Nonlinear THz-PMT and an is-TPG

AU - Kawai, Naoya

AU - Takahashi, Hisanari

AU - Katsuyama, Kota

AU - Takida, Yuma

AU - Buchmann, Tobias Olaf

AU - Sebek, Matej

AU - Lange, Simon Jappe

AU - Jepsen, Peter Uhd

AU - Minamide, Hiroaki

AU - Satozono, Hiroshi

AU - Ohmura, Takayuki

PY - 2023/9/22

Y1 - 2023/9/22

N2 - We use an injection-seeded terahertz (THz)-wave Parametric Generator (is-TPG) source with a THz-PMT detector for spectroscopic measurements on water vapor concentration in air and doping levels of semiconductor wafers. The THz-PMT detector has a highly non-linear response to changes in the electric field strength from the is-TPG source, which allows for precise characterization of miniscule changes in the absorption spectrum. We perform a frequency sweep from 0.7 to 1.2 THz and show that our THz-PMT signal drops significantly at water vapor absorption lines. In addition, we measure changes in the carrier density of Si wafers through reflection mode measurements. This proposed technique, operated with our novel THz instrumentation, is expected to enable highly sensitive and high-speed spectroscopic measurements.

AB - We use an injection-seeded terahertz (THz)-wave Parametric Generator (is-TPG) source with a THz-PMT detector for spectroscopic measurements on water vapor concentration in air and doping levels of semiconductor wafers. The THz-PMT detector has a highly non-linear response to changes in the electric field strength from the is-TPG source, which allows for precise characterization of miniscule changes in the absorption spectrum. We perform a frequency sweep from 0.7 to 1.2 THz and show that our THz-PMT signal drops significantly at water vapor absorption lines. In addition, we measure changes in the carrier density of Si wafers through reflection mode measurements. This proposed technique, operated with our novel THz instrumentation, is expected to enable highly sensitive and high-speed spectroscopic measurements.

KW - Semiconductor device measurement

KW - Sensitivity

KW - Density measurement

KW - Absorption

KW - Instruments

KW - Detectors

KW - Silicon

U2 - 10.1109/IRMMW-THz57677.2023.10298855

DO - 10.1109/IRMMW-THz57677.2023.10298855

M3 - Article in proceedings

SN - 979-8-3503-3661-0

BT - Proceedings of 48th International Conference on Infrared, Millimeter, and Terahertz Waves

PB - IEEE

T2 - 48<sup>th</sup> International Conference on Infrared, Millimeter, and Terahertz Waves

Y2 - 17 September 2023 through 22 September 2023

ER -

High Sensitivity Spectroscopic Measurement with a Highly Nonlinear THz-PMT and an is-TPG

Abstract

Conference

Keywords

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