High resolution 100 kV electron beam lithography in SU-8

Brian Bilenberg Olsen, S. Jakobsen, M.S. Schmidt, L.H.D. Skjolding, P. Shi, Peter Bøggild, J.O. Tegenfeldt, Anders Kristensen

    Research output: Contribution to journalJournal articleResearchpeer-review


    High resolution 100 kV electron beam lithography in thin layers of the negative resist SU-8 is demonstrated. Sub-30 nm lines with a pitch down to 300 nm are written in 100 nm thick SU-8. Two reactive ion etch processes are developed in order to transfer the SU-8 structures into a silicon substrate, a Soft O-2-Plasma process to remove SU-8 residues on the silicon surface after development and a highly anisotropic SF6/O-2/CHF3 based process to transfer the pattern into a silicon substrate, with selectivity between silicon and SU-8 of approximately 2. 30 nm lines patterned in SU-8 are successfully transferred into a silicon substrate, which is used as a stamp in a nanoimprint lithography process to fabricate a nanochannel device for DNA stretching experiments.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Issue number4-9
    Pages (from-to)1609-1612
    Publication statusPublished - 2006


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