High-quality factor, high-confinement microring resonators in 4H-silicon carbide-on-insulator

Yi Zheng, Minhao Pu, Ailun Yi, Bingdong Chang, Tiangui You, Kai Huang, Ayman N. Kamel, Martin R. Henriksen, Asbjørn A. Jørgensen, Xin Ou, Haiyan Ou*

*Corresponding author for this work

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Abstract

Silicon carbide (SiC) exhibits promising material properties for nonlinear integrated optics. We report on a SiC-on-insulator platform based on crystalline 4H-SiC and demonstrate high-confinement SiC microring resonators with sub-micron waveguide cross-sectional dimensions. The Q factor of SiC microring resonators in such a sub-micron waveguide dimension is improved by a factor of six after surface roughness reduction by applying a wet oxidation process. We achieve a high Q factor (73,000) for such devices and show engineerable dispersion from normal to anomalous dispersion by controlling the waveguide cross-sectional dimension, which paves the way toward nonlinear applications in SiC microring resonators.

Original languageEnglish
JournalOptics Express
Volume27
Issue number9
Pages (from-to)13053-13060
ISSN1094-4087
DOIs
Publication statusPublished - 29 Apr 2019

Cite this

Zheng, Yi ; Pu, Minhao ; Yi, Ailun ; Chang, Bingdong ; You, Tiangui ; Huang, Kai ; Kamel, Ayman N. ; Henriksen, Martin R. ; Jørgensen, Asbjørn A. ; Ou, Xin ; Ou, Haiyan. / High-quality factor, high-confinement microring resonators in 4H-silicon carbide-on-insulator. In: Optics Express. 2019 ; Vol. 27, No. 9. pp. 13053-13060.
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abstract = "Silicon carbide (SiC) exhibits promising material properties for nonlinear integrated optics. We report on a SiC-on-insulator platform based on crystalline 4H-SiC and demonstrate high-confinement SiC microring resonators with sub-micron waveguide cross-sectional dimensions. The Q factor of SiC microring resonators in such a sub-micron waveguide dimension is improved by a factor of six after surface roughness reduction by applying a wet oxidation process. We achieve a high Q factor (73,000) for such devices and show engineerable dispersion from normal to anomalous dispersion by controlling the waveguide cross-sectional dimension, which paves the way toward nonlinear applications in SiC microring resonators.",
author = "Yi Zheng and Minhao Pu and Ailun Yi and Bingdong Chang and Tiangui You and Kai Huang and Kamel, {Ayman N.} and Henriksen, {Martin R.} and J{\o}rgensen, {Asbj{\o}rn A.} and Xin Ou and Haiyan Ou",
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High-quality factor, high-confinement microring resonators in 4H-silicon carbide-on-insulator. / Zheng, Yi; Pu, Minhao; Yi, Ailun; Chang, Bingdong; You, Tiangui; Huang, Kai; Kamel, Ayman N.; Henriksen, Martin R.; Jørgensen, Asbjørn A.; Ou, Xin; Ou, Haiyan.

In: Optics Express, Vol. 27, No. 9, 29.04.2019, p. 13053-13060.

Research output: Contribution to journalJournal articleResearchpeer-review

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T1 - High-quality factor, high-confinement microring resonators in 4H-silicon carbide-on-insulator

AU - Zheng, Yi

AU - Pu, Minhao

AU - Yi, Ailun

AU - Chang, Bingdong

AU - You, Tiangui

AU - Huang, Kai

AU - Kamel, Ayman N.

AU - Henriksen, Martin R.

AU - Jørgensen, Asbjørn A.

AU - Ou, Xin

AU - Ou, Haiyan

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Y1 - 2019/4/29

N2 - Silicon carbide (SiC) exhibits promising material properties for nonlinear integrated optics. We report on a SiC-on-insulator platform based on crystalline 4H-SiC and demonstrate high-confinement SiC microring resonators with sub-micron waveguide cross-sectional dimensions. The Q factor of SiC microring resonators in such a sub-micron waveguide dimension is improved by a factor of six after surface roughness reduction by applying a wet oxidation process. We achieve a high Q factor (73,000) for such devices and show engineerable dispersion from normal to anomalous dispersion by controlling the waveguide cross-sectional dimension, which paves the way toward nonlinear applications in SiC microring resonators.

AB - Silicon carbide (SiC) exhibits promising material properties for nonlinear integrated optics. We report on a SiC-on-insulator platform based on crystalline 4H-SiC and demonstrate high-confinement SiC microring resonators with sub-micron waveguide cross-sectional dimensions. The Q factor of SiC microring resonators in such a sub-micron waveguide dimension is improved by a factor of six after surface roughness reduction by applying a wet oxidation process. We achieve a high Q factor (73,000) for such devices and show engineerable dispersion from normal to anomalous dispersion by controlling the waveguide cross-sectional dimension, which paves the way toward nonlinear applications in SiC microring resonators.

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DO - 10.1364/OE.27.013053

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SP - 13053

EP - 13060

JO - Optics Express

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SN - 1094-4087

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