High-quality factor, high-confinement microring resonators in 4H-silicon carbide-on-insulator

Yi Zheng, Minhao Pu, Ailun Yi, Bingdong Chang, Tiangui You, Kai Huang, Ayman N. Kamel, Martin R. Henriksen, Asbjørn A. Jørgensen, Xin Ou, Haiyan Ou*

*Corresponding author for this work

Research output: Contribution to journalJournal articlepeer-review

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Silicon carbide (SiC) exhibits promising material properties for nonlinear integrated optics. We report on a SiC-on-insulator platform based on crystalline 4H-SiC and demonstrate high-confinement SiC microring resonators with sub-micron waveguide cross-sectional dimensions. The Q factor of SiC microring resonators in such a sub-micron waveguide dimension is improved by a factor of six after surface roughness reduction by applying a wet oxidation process. We achieve a high Q factor (73,000) for such devices and show engineerable dispersion from normal to anomalous dispersion by controlling the waveguide cross-sectional dimension, which paves the way toward nonlinear applications in SiC microring resonators.

Original languageEnglish
JournalOptics Express
Issue number9
Pages (from-to)13053-13060
Publication statusPublished - 29 Apr 2019


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