High-pressure silicon sensor with low-cost packaging

Karen Birkelund; Peter Gravesen; Sergey Shiryaev; Per Brandt Rasmussen; Maria Dall Rasmussen

High-pressure silicon sensor with low-cost packaging

Karen Birkelund, Peter Gravesen, Sergey Shiryaev, Per Brandt Rasmussen, Maria Dall Rasmussen

Danfoss AS

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

We present a silicon high-pressure sensor based on fusion bonding with lateral feed-through and a compact low-cost packaging. The sensor has a burst pressure exceeding 3000 bar and can be designed for a maximum pressure in the range from 35 to 1500 bar and temperatures ranging from ÿ40 to 1208C. Design considerations and test results of the sensor are presented.
Keyword: Fusion bonding,Pressure sensor,Packaging

Original language	English
Journal	Sensors and Actuators A: Physical
Volume	2948
Pages (from-to)	1-7
ISSN	0924-4247
Publication status	Published - 2001
Externally published	Yes

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title = "High-pressure silicon sensor with low-cost packaging",

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AU - Gravesen, Peter

AU - Shiryaev, Sergey

AU - Rasmussen, Per Brandt

AU - Rasmussen, Maria Dall

PY - 2001

Y1 - 2001

N2 - We present a silicon high-pressure sensor based on fusion bonding with lateral feed-through and a compact low-cost packaging. The sensor has a burst pressure exceeding 3000 bar and can be designed for a maximum pressure in the range from 35 to 1500 bar and temperatures ranging from ÿ40 to 1208C. Design considerations and test results of the sensor are presented. Keyword: Fusion bonding,Pressure sensor,Packaging

AB - We present a silicon high-pressure sensor based on fusion bonding with lateral feed-through and a compact low-cost packaging. The sensor has a burst pressure exceeding 3000 bar and can be designed for a maximum pressure in the range from 35 to 1500 bar and temperatures ranging from ÿ40 to 1208C. Design considerations and test results of the sensor are presented. Keyword: Fusion bonding,Pressure sensor,Packaging

M3 - Journal article

SN - 0924-4247

VL - 2948

SP - 1

EP - 7

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -

High-pressure silicon sensor with low-cost packaging

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