High-performance spinning device for DVD-based micromechanical signal transduction

En-Te Hwu, Ching-Hsiu Chen, Filippo Bosco, Wei-Min Wang, Hsien-Chen Ko, Ing-Shouh Hwang, Anja Boisen, Kuang-Yuh Huang

    Research output: Contribution to journalJournal articleResearchpeer-review


    Here we report a high-throughput spinning device for nanometric scale measurements of microstructures with instrumentation details and experimental results. The readout technology implemented in the designed disc-like device is based on a DVD data storage optical pick-up unit (OPU). With a spinning mechanism, this device can simultaneously measure surface topography, mechanical deflections and resonance frequencies of several microfabricated beams at a high speed. In biochemical sensing applications, the OPU can measure bending changes of functionalized microcantilevers, providing a statistically robust and label-free bio-detection analysis of multiple compounds. The signal-to-noise ratio (S/N) is demonstrated from statistical measurements as 1.2 with arginine detection at 750 nM concentration. Practically, the OPU can measure up to 480 individual cantilever sensors per second with nanometer resolution. The opto-mechanical optimization of the device design and settings for biochemical detection are described.
    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Issue number4
    Pages (from-to)045016
    Publication statusPublished - 2013


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