@conference{a1e2678c13b8488fa40f80c1237d72e0,
title = "High Pattern Density Nanoimprint Lithography Stamps Fabricated by Means of Negative Electron Beam Lithography Resist and dry Etching in Silicon",
author = "Olsen, {Brian Bilenberg} and Mikkel Sch{\o}ler and Schmidt, {Michael Stenb{\ae}k} and Peter B{\o}ggild and Anders Kristensen and P. Shi and {Hagedorn Frandsen}, L. and Borel, {P. I.}",
year = "2005",
language = "English",
note = "2005 Annual Meeting of the Danish Optical Society ; Conference date: 17-11-2005 Through 18-11-2005",
}