High Pattern Density Nanoimprint Lithography Stamps Fabricated by Means of Negative Electron Beam Lithography Resist and dry Etching in Silicon

Brian Bilenberg Olsen, Mikkel Schøler, Michael Stenbæk Schmidt, Peter Bøggild, Anders Kristensen, P. Shi, L. Hagedorn Frandsen, P. I. Borel

    Research output: Contribution to conferencePosterResearch

    Original languageEnglish
    Publication date2005
    Publication statusPublished - 2005
    EventDanish Optical Society Annual Meeting -
    Duration: 1 Jan 2005 → …


    ConferenceDanish Optical Society Annual Meeting
    Period01/01/2005 → …

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