High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS

Zachary James Davis; G. Abadal; B. Helbo; Ole Hansen; F. Campabadal; F. Pérez-Murano; J. Esteve; E. Figueras; R. Ruiz; N. Barniol; Anja Boisen

High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS

Zachary James Davis
, G. Abadal
, B. Helbo
, Ole Hansen
, F. Campabadal
, F. Pérez-Murano
, J. Esteve
, E. Figueras
, R. Ruiz
, N. Barniol
, Anja Boisen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceeding of Transdusers ’01
Publication date	2001
Pages	72-75
Publication status	Published - 2001

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@inproceedings{865f7fedc85c4365b42d3235fd580bab,

title = "High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS",

author = "Davis, \{Zachary James\} and G. Abadal and B. Helbo and Ole Hansen and F. Campabadal and F. P{\'e}rez-Murano and J. Esteve and E. Figueras and R. Ruiz and N. Barniol and Anja Boisen",

year = "2001",

language = "English",

pages = "72--75",

booktitle = "Proceeding of Transdusers {\textquoteright}01",

}

TY - GEN

T1 - High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS

AU - Davis, Zachary James

AU - Abadal, G.

AU - Helbo, B.

AU - Hansen, Ole

AU - Campabadal, F.

AU - Pérez-Murano, F.

AU - Esteve, J.

AU - Figueras, E.

AU - Ruiz, R.

AU - Barniol, N.

AU - Boisen, Anja

PY - 2001

Y1 - 2001

M3 - Article in proceedings

SP - 72

EP - 75

BT - Proceeding of Transdusers ’01

ER -