High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS ciruitry

Zachary James Davis, G. Abadal, B. Helbo, Ole Hansen, F. Campabadal, F. Pérez-Murano, J. Esteve, E. Figueras, R. Ruiz, N. Barniol, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of STM ’01
    Number of pages47
    Publication date2001
    Publication statusPublished - 2001

    Cite this

    Davis, Z. J., Abadal, G., Helbo, B., Hansen, O., Campabadal, F., Pérez-Murano, F., Esteve, J., Figueras, E., Ruiz, R., Barniol, N., & Boisen, A. (2001). High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS ciruitry. In Proceedings of STM ’01