High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS ciruitry

Zachary James Davis; G. Abadal; B. Helbo; Ole Hansen; F. Campabadal; F. Pérez-Murano; J. Esteve; E. Figueras; R. Ruiz; N. Barniol; Anja Boisen

High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS ciruitry

Zachary James Davis, G. Abadal, B. Helbo, Ole Hansen, F. Campabadal, F. Pérez-Murano, J. Esteve, E. Figueras, R. Ruiz, N. Barniol, Anja Boisen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of STM ’01
Number of pages	47
Publication date	2001
Publication status	Published - 2001

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title = "High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS ciruitry",

author = "Davis, {Zachary James} and G. Abadal and B. Helbo and Ole Hansen and F. Campabadal and F. P{\'e}rez-Murano and J. Esteve and E. Figueras and R. Ruiz and N. Barniol and Anja Boisen",

year = "2001",

language = "English",

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T1 - High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS ciruitry

AU - Davis, Zachary James

AU - Abadal, G.

AU - Helbo, B.

AU - Hansen, Ole

AU - Campabadal, F.

AU - Pérez-Murano, F.

AU - Esteve, J.

AU - Figueras, E.

AU - Ruiz, R.

AU - Barniol, N.

AU - Boisen, Anja

PY - 2001

Y1 - 2001

M3 - Article in proceedings

BT - Proceedings of STM ’01

ER -