High mass and spatial resolution mass sensor based on resonating nano-cantilevers integrated with CMOS

Zachary James Davis, G. Abadal, B. Helbo, Ole Hansen, F. Campabadal, F. Pérez-Murano, J. Esteve, E. Figueras, R. Ruiz, N. Barniol, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceeding of Transdusers ’01
    Publication date2001
    Publication statusPublished - 2001

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