Mass fabrication of polymer micro components with high aspect ratio micro-structures requires high performance micro tools allowing the use of low cost replication processes such as micro injection moulding. In this regard an innovative process chain, based on a combination of micro electrical discharge machining (mu EDM) of a silicon substrate, electroforming and selective etching was used for the manufacturing of a micro tool. The micro tool was employed for polymer replication by means of the injection moulding process.
|Journal||Microsystem Technologies : Micro- and Nanosystems Information Storage and Processing Systems|
|Publication status||Published - 2008|
Tosello, G., Bissacco, G., Tang, P. T., Hansen, H. N., & Nielsen, P. C. (2008). High aspect ratio micro tool manufacturing for polymer replication using mu EDM of silicon, selective etching and electroforming. Microsystem Technologies : Micro- and Nanosystems Information Storage and Processing Systems, 14(9-11), 1757-1764. https://doi.org/10.1007/s00542-008-0564-9