High aspect ratio micro tool manufacturing for polymer replication using mu EDM of silicon, selective etching and electroforming

Guido Tosello, Giuliano Bissacco, Peter Torben Tang, Hans Nørgaard Hansen, P.C. Nielsen

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

Mass fabrication of polymer micro components with high aspect ratio micro-structures requires high performance micro tools allowing the use of low cost replication processes such as micro injection moulding. In this regard an innovative process chain, based on a combination of micro electrical discharge machining (mu EDM) of a silicon substrate, electroforming and selective etching was used for the manufacturing of a micro tool. The micro tool was employed for polymer replication by means of the injection moulding process.
Original languageEnglish
JournalMicrosystem Technologies : Micro- and Nanosystems Information Storage and Processing Systems
Volume14
Issue number9-11
Pages (from-to)1757-1764
ISSN0946-7076
DOIs
Publication statusPublished - 2008

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