TY - JOUR
T1 - High aspect ratio micro tool manufacturing for polymer replication using mu EDM of silicon, selective etching and electroforming
AU - Tosello, Guido
AU - Bissacco, Giuliano
AU - Tang, Peter Torben
AU - Hansen, Hans Nørgaard
AU - Nielsen, P.C.
PY - 2008
Y1 - 2008
N2 - Mass fabrication of polymer micro components with high aspect ratio micro-structures requires high performance micro tools allowing the use of low cost replication processes such as micro injection moulding. In this regard an innovative process chain, based on a combination of micro electrical discharge machining (mu EDM) of a silicon substrate, electroforming and selective etching was used for the manufacturing of a micro tool. The micro tool was employed for polymer replication by means of the injection moulding process.
AB - Mass fabrication of polymer micro components with high aspect ratio micro-structures requires high performance micro tools allowing the use of low cost replication processes such as micro injection moulding. In this regard an innovative process chain, based on a combination of micro electrical discharge machining (mu EDM) of a silicon substrate, electroforming and selective etching was used for the manufacturing of a micro tool. The micro tool was employed for polymer replication by means of the injection moulding process.
U2 - 10.1007/s00542-008-0564-9
DO - 10.1007/s00542-008-0564-9
M3 - Journal article
SN - 0946-7076
VL - 14
SP - 1757
EP - 1764
JO - Microsystem Technologies : Micro- and Nanosystems Information Storage and Processing Systems
JF - Microsystem Technologies : Micro- and Nanosystems Information Storage and Processing Systems
IS - 9-11
ER -