Abstract
Polished silicon crystals, lacquered aluminum foil, and float glass substrates with respect to surface roughness. Co/C multilayers were then deposited by electron-beam evaporation with in situ monitoring x-ray signal and ion polishing (Kr+) for the metal layer. The specular as well as the transverse scan have demonstrated different qualities, influenced by the different substrates. The investigations were performed with both hard x-ray (8.05 keV) as well as soft x-ray (0.25 keV). The reflectivity varies up to factor 3 between the best and the worst of these substrates. The results of these investigations and a comparison between the coating performances are discussed.
Original language | English |
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Journal | Proceedings of SPIE, the International Society for Optical Engineering |
Issue number | 2515 |
Pages (from-to) | 487-493 |
ISSN | 0361-0748 |
DOIs | |
Publication status | Published - 1995 |
Event | SPIE 1995 International Symposium on Optical Science, Engineering, and Instrumentation: X-Ray and Extreme Ultraviolet Optics - San Diego, United States Duration: 9 Jul 1995 → 14 Jul 1995 |
Conference
Conference | SPIE 1995 International Symposium on Optical Science, Engineering, and Instrumentation |
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Country | United States |
City | San Diego |
Period | 09/07/1995 → 14/07/1995 |
Other | SPIE vol. 2515 |