Polished silicon crystals, lacquered aluminum foil, and float glass substrates with respect to surface roughness. Co/C multilayers were then deposited by electron-beam evaporation with in situ monitoring x-ray signal and ion polishing (Kr+) for the metal layer. The specular as well as the transverse scan have demonstrated different qualities, influenced by the different substrates. The investigations were performed with both hard x-ray (8.05 keV) as well as soft x-ray (0.25 keV). The reflectivity varies up to factor 3 between the best and the worst of these substrates. The results of these investigations and a comparison between the coating performances are discussed.
|Journal||Proceedings of SPIE, the International Society for Optical Engineering|
|Publication status||Published - 1995|
|Event||SPIE 1995 International Symposium on Optical Science, Engineering, and Instrumentation: X-Ray and Extreme Ultraviolet Optics - San Diego, United States|
Duration: 9 Jul 1995 → 14 Jul 1995
|Conference||SPIE 1995 International Symposium on Optical Science, Engineering, and Instrumentation|
|Period||09/07/1995 → 14/07/1995|
|Other||SPIE vol. 2515|