Hard and soft x-ray study of the correlation between substrate quality and multilayer performance for Co/C coating produced by electron beam evaporation using ion polishing

S. Abdali; Finn Erland Christensen; E. Spiller; E. Louis

doi:10.1117/12.212620

Hard and soft x-ray study of the correlation between substrate quality and multilayer performance for Co/C coating produced by electron beam evaporation using ion polishing

S. Abdali, Finn Erland Christensen, E. Spiller, E. Louis

National Space Institute

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

Polished silicon crystals, lacquered aluminum foil, and float glass substrates with respect to surface roughness. Co/C multilayers were then deposited by electron-beam evaporation with in situ monitoring x-ray signal and ion polishing (Kr+) for the metal layer. The specular as well as the transverse scan have demonstrated different qualities, influenced by the different substrates. The investigations were performed with both hard x-ray (8.05 keV) as well as soft x-ray (0.25 keV). The reflectivity varies up to factor 3 between the best and the worst of these substrates. The results of these investigations and a comparison between the coating performances are discussed.

Original language	English
Journal	Proceedings of SPIE, the International Society for Optical Engineering
Issue number	2515
Pages (from-to)	487-493
ISSN	0361-0748
DOIs	https://doi.org/10.1117/12.212620
Publication status	Published - 1995
Event	SPIE 1995 International Symposium on Optical Science, Engineering, and Instrumentation: X-Ray and Extreme Ultraviolet Optics - San Diego, United States Duration: 9 Jul 1995 → 14 Jul 1995

Conference

Conference	SPIE 1995 International Symposium on Optical Science, Engineering, and Instrumentation
Country	United States
City	San Diego
Period	09/07/1995 → 14/07/1995
Other	SPIE vol. 2515

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@inproceedings{c18c7a4c47ba4d8f87efba40c1f83dac,

title = "Hard and soft x-ray study of the correlation between substrate quality and multilayer performance for Co/C coating produced by electron beam evaporation using ion polishing",

abstract = "Polished silicon crystals, lacquered aluminum foil, and float glass substrates with respect to surface roughness. Co/C multilayers were then deposited by electron-beam evaporation with in situ monitoring x-ray signal and ion polishing (Kr+) for the metal layer. The specular as well as the transverse scan have demonstrated different qualities, influenced by the different substrates. The investigations were performed with both hard x-ray (8.05 keV) as well as soft x-ray (0.25 keV). The reflectivity varies up to factor 3 between the best and the worst of these substrates. The results of these investigations and a comparison between the coating performances are discussed.",

author = "S. Abdali and Christensen, {Finn Erland} and E. Spiller and E. Louis",

year = "1995",

doi = "10.1117/12.212620",

language = "English",

pages = "487--493",

journal = "Proceedings of SPIE, the International Society for Optical Engineering",

issn = "0277-786X",

publisher = "S P I E - International Society for Optical Engineering",

number = "2515",

note = "SPIE 1995 International Symposium on Optical Science, Engineering, and Instrumentation : X-Ray and Extreme Ultraviolet Optics ; Conference date: 09-07-1995 Through 14-07-1995",

}

Hard and soft x-ray study of the correlation between substrate quality and multilayer performance for Co/C coating produced by electron beam evaporation using ion polishing. / Abdali, S.; Christensen, Finn Erland; Spiller, E.; Louis, E.

In: Proceedings of SPIE, the International Society for Optical Engineering, No. 2515, 1995, p. 487-493.

Research output: Contribution to journal › Conference article › Research › peer-review

TY - GEN

T1 - Hard and soft x-ray study of the correlation between substrate quality and multilayer performance for Co/C coating produced by electron beam evaporation using ion polishing

AU - Abdali, S.

AU - Christensen, Finn Erland

AU - Spiller, E.

AU - Louis, E.

PY - 1995

Y1 - 1995

N2 - Polished silicon crystals, lacquered aluminum foil, and float glass substrates with respect to surface roughness. Co/C multilayers were then deposited by electron-beam evaporation with in situ monitoring x-ray signal and ion polishing (Kr+) for the metal layer. The specular as well as the transverse scan have demonstrated different qualities, influenced by the different substrates. The investigations were performed with both hard x-ray (8.05 keV) as well as soft x-ray (0.25 keV). The reflectivity varies up to factor 3 between the best and the worst of these substrates. The results of these investigations and a comparison between the coating performances are discussed.

AB - Polished silicon crystals, lacquered aluminum foil, and float glass substrates with respect to surface roughness. Co/C multilayers were then deposited by electron-beam evaporation with in situ monitoring x-ray signal and ion polishing (Kr+) for the metal layer. The specular as well as the transverse scan have demonstrated different qualities, influenced by the different substrates. The investigations were performed with both hard x-ray (8.05 keV) as well as soft x-ray (0.25 keV). The reflectivity varies up to factor 3 between the best and the worst of these substrates. The results of these investigations and a comparison between the coating performances are discussed.

U2 - 10.1117/12.212620

DO - 10.1117/12.212620

M3 - Conference article

SP - 487

EP - 493

JO - Proceedings of SPIE, the International Society for Optical Engineering

JF - Proceedings of SPIE, the International Society for Optical Engineering

SN - 0277-786X

IS - 2515

T2 - SPIE 1995 International Symposium on Optical Science, Engineering, and Instrumentation

Y2 - 9 July 1995 through 14 July 1995

ER -