Hard and soft x-ray study of the correlation between substrate quality and multilayer performance for Co/C coating produced by electron beam evaporation using ion polishing

S. Abdali, Finn Erland Christensen, E. Spiller, E. Louis

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Polished silicon crystals, lacquered aluminum foil, and float glass substrates with respect to surface roughness. Co/C multilayers were then deposited by electron-beam evaporation with in situ monitoring x-ray signal and ion polishing (Kr+) for the metal layer. The specular as well as the transverse scan have demonstrated different qualities, influenced by the different substrates. The investigations were performed with both hard x-ray (8.05 keV) as well as soft x-ray (0.25 keV). The reflectivity varies up to factor 3 between the best and the worst of these substrates. The results of these investigations and a comparison between the coating performances are discussed.
Original languageEnglish
JournalProceedings of SPIE, the International Society for Optical Engineering
Issue number2515
Pages (from-to)487-493
Publication statusPublished - 1995
EventSPIE 1995 International Symposium on Optical Science, Engineering, and Instrumentation: X-Ray and Extreme Ultraviolet Optics - San Diego, United States
Duration: 9 Jul 199514 Jul 1995


ConferenceSPIE 1995 International Symposium on Optical Science, Engineering, and Instrumentation
CountryUnited States
CitySan Diego
OtherSPIE vol. 2515

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