Hands-on project aimed at technical education: Realizing a DC magnetron sputtering system

S. Massahi*, D. D.M. Ferreira, Michael H. Avngaard, A. B. Christensen, D. T. Haugbølle, K. W. Jensen, I. F. Mejnertz, J. S. Selsner, M. J. Westermann, R. Fléron, F. E. Christensen, N. Gellert, S. Svendsen, P. L. Henriksen, A. Jegers

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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    Abstract

    We present a teaching concept which combines theory, experimental work, project management and organization. As part of the Earth and Space Physics and Engineering education at DTU Space, a group of first year undergraduate students were given the task to design, build and test a DC magnetron sputtering system within a very limited budget and time frame. The teaching concept is designed to promote the students' autonomous learning, and a major part of the project was to teach the students how to develop group dynamics successfully. The students successfully managed to build a direct current magnetron sputtering system wherein a plasma glow was produced. The system can be used for depositing thin film coatings, an enabling technology for numerous applications.

    Original languageEnglish
    Title of host publicationProceedings of SPIE : Novel Optical Systems, Methods, and Applications XXIV
    EditorsCornelius F. Hahlweg, Joseph R. Mulley
    Number of pages8
    Volume11815
    PublisherSPIE - International Society for Optical Engineering
    Publication date2021
    Article number118150Q
    ISBN (Electronic)9781510644687
    DOIs
    Publication statusPublished - 2021
    EventSPIE Optical Engineering + Applications 2021 - San Diego, United States
    Duration: 1 Aug 20215 Aug 2021

    Conference

    ConferenceSPIE Optical Engineering + Applications 2021
    Country/TerritoryUnited States
    CitySan Diego
    Period01/08/202105/08/2021
    SeriesProceedings of SPIE - The International Society for Optical Engineering
    Volume11815
    ISSN0277-786X

    Keywords

    • Dc magnetron sputtering
    • DTU Space
    • Engineering work
    • Teaching
    • X ray optics

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