Growth of thin films of TiN on MgO(100) monitored by high-pressure RHEED

Nini Pryds, D. Cockburn, Katarzyna Agnieszka Rodrigo, Inge Lise Rasmussen, Jesper Knudsen, Jørgen Schou

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

Reflection high-energy electron diffraction (RHEED) operated at high pressure has been used to monitor the initial growth of titanium nitride (TiN) thin films on single-crystal (100) MgO substrates by pulsed laser deposition (PLD). This is the first RHEED study where the growth of TiN films is produced by PLD directly from a TiN target. At the initial stage of the growth (average thickness similar to 2.4 nm) the formation of islands is observed. During the continuous growth the islands merge into a smooth surface as indicated by the RHEED, atomic force microscopy and field emission scanning electron microscopy. These observations are in good agreement with the three-dimensional Volmer-Weber growth type, by which three-dimensional crystallites are formed and later cause a continuous surface roughening. This leads to an exponential decrease in the intensity of the specular spot in the RHEED pattern as well.
Original languageEnglish
JournalApplied Physics A: Materials Science & Processing
Volume93
Issue number3
Pages (from-to)705-710
ISSN0947-8396
DOIs
Publication statusPublished - 2008

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