Original language | English |
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Title of host publication | Proceedings of SPIE |
Volume | 6110 |
Publication date | 2006 |
Pages | 69-76 |
Publication status | Published - 2006 |
Event | SPIE Photonics West MOEMS/MEMS 2006 Micro and Nanofabrication - San Jose, United States Duration: 21 Jan 2006 → 27 Jan 2006 |
Conference
Conference | SPIE Photonics West MOEMS/MEMS 2006 Micro and Nanofabrication |
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Country/Territory | United States |
City | San Jose |
Period | 21/01/2006 → 27/01/2006 |