Grey scale electron beam lithography in functionalized SU-8 for active optical devices

Søren Balslev, Torben Rasmussen, P. Shi, Anders Kristensen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of SPIE
    Volume6110
    Publication date2006
    Pages69-76
    Publication statusPublished - 2006
    EventSPIE's Photonics West MOEMS/MEMS 2006: Micromachining Technology for Micro-Optics and Nano-Optics IV - San Jose, United States
    Duration: 21 Jan 200626 Jan 2006
    Conference number: 6110

    Conference

    ConferenceSPIE's Photonics West MOEMS/MEMS 2006
    Number6110
    Country/TerritoryUnited States
    CitySan Jose
    Period21/01/200626/01/2006

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