Grey scale electron beam lithography in functionalized SU-8 for active optical devices

Søren Balslev, Torben Rasmussen, P. Shi, Anders Kristensen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of SPIE
    Volume6110
    Publication date2006
    Pages69-76
    Publication statusPublished - 2006
    EventThe conference on Micromachining Technology for Micro-optics and Nano-optics IV, part of the International Symposium on Integrated Optoelectronic Devices 2005 at SPIE's Photonics West - San Jose, CA USA
    Duration: 1 Jan 2006 → …

    Conference

    ConferenceThe conference on Micromachining Technology for Micro-optics and Nano-optics IV, part of the International Symposium on Integrated Optoelectronic Devices 2005 at SPIE's Photonics West
    CitySan Jose, CA USA
    Period01/01/2006 → …

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