@article{a512d3f7fdb64ca497299c38893dd53d,
title = "Ge-nanoclusters were formed by electron-beam irradiation in Ge-doped silica-on-silicon thin films. The size and density of the clusters can be controlled by the irradiation intensity and time.",
abstract = "Ge-nanoclusters were formed by electron-beam irradiation in Ge-doped silica-on-silicon thin films. The size and density of the clusters can be controlled by the irradiation intensity and time.",
author = "Haiyan Ou and R{\o}rdam, \{Troels Peter\} and Karsten Rottwitt and Grumsen, \{Flemming Bjerg\} and Andy Horsewell",
year = "2006",
doi = "10.1049/el:20060399",
language = "English",
volume = "42",
pages = "532--534",
journal = "Electronics Letters",
issn = "0013-5194",
publisher = "John Wiley \& Sons Inc.",
number = "9",
}