Ge nanoclusters in PECVD-deposited glass caused only by heat treatment

Haiyan Ou, Troels Peter Rørdam, Karsten Rottwitt, Flemming Bjerg Grumsen, Andy Horsewell, Rolf W. Berg, Peixiong Shi

Research output: Contribution to journal › Journal article › Research › peer-review

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Engineering

Material Science

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