Fundamental electron and ion beam interactions with solids for microscopy, microanalysis and microlithography

Jørgen Schou, P. Kruit, D.E. Newbury

Research output: Book/Report › Book › Research › peer-review

Original language	English

Place of Publication	Chicago, IL
Publisher	Scanning Microscopy International
Number of pages	370
Publication status	Published - 1991

Series	Scanning Microscopy Supplement, 4

OpenUrl availability

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title = "Fundamental electron and ion beam interactions with solids for microscopy, microanalysis and microlithography",

keywords = "Materialers atomare struktur og egenskaber; Optik og fluid dynamik",

author = "J{\o}rgen Schou and P. Kruit and D.E. Newbury",

year = "1991",

language = "English",

series = "Scanning Microscopy Supplement, 4",

publisher = "Scanning Microscopy International",

address = "United States",

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T1 - Fundamental electron and ion beam interactions with solids for microscopy, microanalysis and microlithography

AU - Schou, Jørgen

AU - Kruit, P.

AU - Newbury, D.E.

PY - 1991

Y1 - 1991

KW - Materialers atomare struktur og egenskaber; Optik og fluid dynamik

M3 - Book

T3 - Scanning Microscopy Supplement, 4

BT - Fundamental electron and ion beam interactions with solids for microscopy, microanalysis and microlithography

PB - Scanning Microscopy International

CY - Chicago, IL

ER -