Functionalised SU-8 patterned with X-ray lithography

Søren Balslev, Anders Kristensen, F. Romanato, E.M. Di Fabrizio

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, EIPBN49
    Publication date2005
    Publication statusPublished - 2005
    Event49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication - Orlando, FL, United States
    Duration: 31 May 20053 Jun 2005
    Conference number: 49

    Conference

    Conference49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
    Number49
    CountryUnited States
    CityOrlando, FL
    Period31/05/200503/06/2005

    Cite this

    Balslev, S., Kristensen, A., Romanato, F., & Di Fabrizio, E. M. (2005). Functionalised SU-8 patterned with X-ray lithography. In Proceedings of the 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, EIPBN49