Abstract
We present a lab-on-a-chip device featuring a microfluidic dye laser, wave-guides, microfluidic components and photo-detectors integrated on the chip. The microsystem is designed for wavelength selective absorption measurements in the visible range on a fluidic sample, which can be prepared/mixed on-chip. The laser structures, wave-guides and micro-fluidic handling system are defined in a single UV-lithography step on a 10 μm thick SU-8 layer on top of the substrate. The SU-8 structures are sealed by a Borofloat glass lid, using polymethylmethacrylate (PMMA) adhesive bonding.
Original language | English |
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Title of host publication | Proceedings of IEEE MEMS 2004 |
Publisher | IEEE |
Publication date | 2004 |
Pages | 89-92 |
ISBN (Print) | 0-7803-8265-x |
DOIs | |
Publication status | Published - 2004 |
Event | 17th IEEE International Conference on Micro Electro Mechanical Systems - Maastricht, Netherlands Duration: 25 Jan 2004 → 29 Jan 2004 Conference number: 17 https://ieeexplore.ieee.org/xpl/conhome/9060/proceeding |
Conference
Conference | 17th IEEE International Conference on Micro Electro Mechanical Systems |
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Number | 17 |
Country/Territory | Netherlands |
City | Maastricht |
Period | 25/01/2004 → 29/01/2004 |
Internet address |