Fully integrated optical system for lab-on-a-chip applications

Søren Balslev; Brian Bilenberg Olsen; Oliver Geschke; Anders Michael Jørgensen; Anders Kristensen; Jörg Peter Kutter; Klaus Bo Mogensen; Detlef Snakenborg

doi:10.1109/MEMS.2004.1290529

Fully integrated optical system for lab-on-a-chip applications

Søren Balslev, Brian Bilenberg Olsen, Oliver Geschke, Anders Michael Jørgensen, Anders Kristensen, Jörg Peter Kutter, Klaus Bo Mogensen, Detlef Snakenborg

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Abstract

We present a lab-on-a-chip device featuring a microfluidic dye laser, wave-guides, microfluidic components and photo-detectors integrated on the chip. The microsystem is designed for wavelength selective absorption measurements in the visible range on a fluidic sample, which can be prepared/mixed on-chip. The laser structures, wave-guides and micro-fluidic handling system are defined in a single UV-lithography step on a 10 μm thick SU-8 layer on top of the substrate. The SU-8 structures are sealed by a Borofloat glass lid, using polymethylmethacrylate (PMMA) adhesive bonding.

Original language	English
Title of host publication	Proceedings of IEEE MEMS 2004
Publisher	IEEE
Publication date	2004
Pages	89-92
ISBN (Print)	0-7803-8265-x
DOIs	https://doi.org/10.1109/MEMS.2004.1290529
Publication status	Published - 2004
Event	17th IEEE International Conference on Micro Electro Mechanical Systems - Maastricht, Netherlands Duration: 25 Jan 2004 → 29 Jan 2004 Conference number: 17 https://ieeexplore.ieee.org/xpl/conhome/9060/proceeding

Conference

Conference	17th IEEE International Conference on Micro Electro Mechanical Systems
Number	17
Country/Territory	Netherlands
City	Maastricht
Period	25/01/2004 → 29/01/2004
Internet address	https://ieeexplore.ieee.org/xpl/conhome/9060/proceeding

Bibliographical note

Copyright: 2004 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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@inproceedings{0759efb454cf411bb97079d0b1478e06,

title = "Fully integrated optical system for lab-on-a-chip applications",

abstract = "We present a lab-on-a-chip device featuring a microfluidic dye laser, wave-guides, microfluidic components and photo-detectors integrated on the chip. The microsystem is designed for wavelength selective absorption measurements in the visible range on a fluidic sample, which can be prepared/mixed on-chip. The laser structures, wave-guides and micro-fluidic handling system are defined in a single UV-lithography step on a 10 μm thick SU-8 layer on top of the substrate. The SU-8 structures are sealed by a Borofloat glass lid, using polymethylmethacrylate (PMMA) adhesive bonding.",

author = "S{\o}ren Balslev and Olsen, {Brian Bilenberg} and Oliver Geschke and J{\o}rgensen, {Anders Michael} and Anders Kristensen and Kutter, {J{\"o}rg Peter} and Mogensen, {Klaus Bo} and Detlef Snakenborg",

note = "Copyright: 2004 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; 17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004 ; Conference date: 25-01-2004 Through 29-01-2004",

year = "2004",

doi = "10.1109/MEMS.2004.1290529",

language = "English",

isbn = "0-7803-8265-x",

pages = "89--92",

booktitle = "Proceedings of IEEE MEMS 2004",

publisher = "IEEE",

address = "United States",

url = "https://ieeexplore.ieee.org/xpl/conhome/9060/proceeding",

}

Balslev, S, Olsen, BB, Geschke, O, Jørgensen, AM , Kristensen, A, Kutter, JP, Mogensen, KB & Snakenborg, D 2004, Fully integrated optical system for lab-on-a-chip applications. in Proceedings of IEEE MEMS 2004. IEEE, pp. 89-92, 17th IEEE International Conference on Micro Electro Mechanical Systems, Maastricht, Netherlands, 25/01/2004. https://doi.org/10.1109/MEMS.2004.1290529

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T1 - Fully integrated optical system for lab-on-a-chip applications

AU - Balslev, Søren

AU - Olsen, Brian Bilenberg

AU - Geschke, Oliver

AU - Jørgensen, Anders Michael

AU - Kristensen, Anders

AU - Kutter, Jörg Peter

AU - Mogensen, Klaus Bo

AU - Snakenborg, Detlef

N1 - Conference code: 17

PY - 2004

Y1 - 2004

N2 - We present a lab-on-a-chip device featuring a microfluidic dye laser, wave-guides, microfluidic components and photo-detectors integrated on the chip. The microsystem is designed for wavelength selective absorption measurements in the visible range on a fluidic sample, which can be prepared/mixed on-chip. The laser structures, wave-guides and micro-fluidic handling system are defined in a single UV-lithography step on a 10 μm thick SU-8 layer on top of the substrate. The SU-8 structures are sealed by a Borofloat glass lid, using polymethylmethacrylate (PMMA) adhesive bonding.

AB - We present a lab-on-a-chip device featuring a microfluidic dye laser, wave-guides, microfluidic components and photo-detectors integrated on the chip. The microsystem is designed for wavelength selective absorption measurements in the visible range on a fluidic sample, which can be prepared/mixed on-chip. The laser structures, wave-guides and micro-fluidic handling system are defined in a single UV-lithography step on a 10 μm thick SU-8 layer on top of the substrate. The SU-8 structures are sealed by a Borofloat glass lid, using polymethylmethacrylate (PMMA) adhesive bonding.

U2 - 10.1109/MEMS.2004.1290529

DO - 10.1109/MEMS.2004.1290529

M3 - Article in proceedings

SN - 0-7803-8265-x

SP - 89

EP - 92

BT - Proceedings of IEEE MEMS 2004

PB - IEEE

T2 - 17th IEEE International Conference on Micro Electro Mechanical Systems

Y2 - 25 January 2004 through 29 January 2004

ER -

Fully integrated optical system for lab-on-a-chip applications

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