Fully integrated optical system for lab-on-a-chip applications

Søren Balslev, Brian Bilenberg Olsen, Oliver Geschke, Anders Michael Jørgensen, Anders Kristensen, Jörg Peter Kutter, Klaus Bo Mogensen, Detlef Snakenborg

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    Abstract

    We present a lab-on-a-chip device featuring a microfluidic dye laser, wave-guides, microfluidic components and photo-detectors integrated on the chip. The microsystem is designed for wavelength selective absorption measurements in the visible range on a fluidic sample, which can be prepared/mixed on-chip. The laser structures, wave-guides and micro-fluidic handling system are defined in a single UV-lithography step on a 10 μm thick SU-8 layer on top of the substrate. The SU-8 structures are sealed by a Borofloat glass lid, using polymethylmethacrylate (PMMA) adhesive bonding.
    Original languageEnglish
    Title of host publicationProceedings of IEEE MEMS 2004
    PublisherIEEE
    Publication date2004
    Pages89-92
    ISBN (Print)0-7803-8265-x
    DOIs
    Publication statusPublished - 2004
    Event17th IEEE International Conference on Micro Electro Mechanical Systems, 2004. (MEMS) -
    Duration: 1 Jan 2004 → …

    Conference

    Conference17th IEEE International Conference on Micro Electro Mechanical Systems, 2004. (MEMS)
    Period01/01/2004 → …

    Bibliographical note

    Copyright: 2004 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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