Fully integrated optical system for lab-on-a-chip applications

Søren Balslev, Brian Bilenberg Olsen, Oliver Geschke, Anders Michael Jørgensen, Anders Kristensen, Jörg Peter Kutter, Klaus Bo Mogensen, Detlef Snakenborg

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    We present a lab-on-a-chip device featuring a microfluidic dye laser, wave-guides, microfluidic components and photo-detectors integrated on the chip. The microsystem is designed for wavelength selective absorption measurements in the visible range on a fluidic sample, which can be prepared/mixed on-chip. The laser structures, wave-guides and micro-fluidic handling system are defined in a single UV-lithography step on a 10 μm thick SU-8 layer on top of the substrate. The SU-8 structures are sealed by a Borofloat glass lid, using polymethylmethacrylate (PMMA) adhesive bonding.
    Original languageEnglish
    Title of host publicationProceedings of IEEE MEMS 2004
    Publication date2004
    ISBN (Print)0-7803-8265-x
    Publication statusPublished - 2004
    Event17th IEEE International Conference on Micro Electro Mechanical Systems, 2004. (MEMS) -
    Duration: 1 Jan 2004 → …


    Conference17th IEEE International Conference on Micro Electro Mechanical Systems, 2004. (MEMS)
    Period01/01/2004 → …

    Bibliographical note

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