Fully integrated nanoresonator system with attogram/hz mass resolution

Esko Sebastian Forsén; G. Abadal; S.G. Nilsson; J. Verd; Rasmus Kousholt Sandberg; Winnie Edith Svendsen; J. Teva; F. Perez-Murano; J. Esteve; E. Figueras; F. Campabadal; L. Montelius; N. Barniol; Anja Boisen

Fully integrated nanoresonator system with attogram/hz mass resolution

Esko Sebastian Forsén
, G. Abadal
, S.G. Nilsson
, J. Verd
, Rasmus Kousholt Sandberg
, Winnie Edith Svendsen
, J. Teva
, F. Perez-Murano
, J. Esteve
, E. Figueras
, F. Campabadal
, L. Montelius
, N. Barniol
, Anja Boisen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of MEMS 2005
Publication date	2005
Pages	556-559
Publication status	Published - 2005

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@inproceedings{69da832e65fc4b3fa794984e4df4328f,

title = "Fully integrated nanoresonator system with attogram/hz mass resolution",

author = "Fors{\'e}n, \{Esko Sebastian\} and G. Abadal and S.G. Nilsson and J. Verd and Sandberg, \{Rasmus Kousholt\} and Svendsen, \{Winnie Edith\} and J. Teva and F. Perez-Murano and J. Esteve and E. Figueras and F. Campabadal and L. Montelius and N. Barniol and Anja Boisen",

year = "2005",

language = "English",

pages = "556--559",

booktitle = "Proceedings of MEMS 2005",

}

TY - GEN

T1 - Fully integrated nanoresonator system with attogram/hz mass resolution

AU - Forsén, Esko Sebastian

AU - Abadal, G.

AU - Nilsson, S.G.

AU - Verd, J.

AU - Sandberg, Rasmus Kousholt

AU - Svendsen, Winnie Edith

AU - Teva, J.

AU - Perez-Murano, F.

AU - Esteve, J.

AU - Figueras, E.

AU - Campabadal, F.

AU - Montelius, L.

AU - Barniol, N.

AU - Boisen, Anja

PY - 2005

Y1 - 2005

M3 - Article in proceedings

SP - 556

EP - 559

BT - Proceedings of MEMS 2005

ER -