Fully integrated nanoresonator system with attogram/hz mass resolution

Esko Sebastian Forsén, G. Abadal, S.G. Nilsson, J. Verd, Rasmus Kousholt Sandberg, Winnie Edith Svendsen, J. Teva, F. Perez-Murano, J. Esteve, E. Figueras, F. Campabadal, L. Montelius, N. Barniol, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of MEMS 2005
    Publication date2005
    Pages556-559
    Publication statusPublished - 2005

    Cite this

    Forsén, E. S., Abadal, G., Nilsson, S. G., Verd, J., Sandberg, R. K., Svendsen, W. E., Teva, J., Perez-Murano, F., Esteve, J., Figueras, E., Campabadal, F., Montelius, L., Barniol, N., & Boisen, A. (2005). Fully integrated nanoresonator system with attogram/hz mass resolution. In Proceedings of MEMS 2005 (pp. 556-559)