Original language | English |
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Title of host publication | Proceedings of MEMS 2005 |
Publication date | 2005 |
Pages | 556-559 |
Publication status | Published - 2005 |
Fully integrated nanoresonator system with attogram/hz mass resolution
Esko Sebastian Forsén, G. Abadal, S.G. Nilsson, J. Verd, Rasmus Kousholt Sandberg, Winnie Edith Svendsen, J. Teva, F. Perez-Murano, J. Esteve, E. Figueras, F. Campabadal, L. Montelius, N. Barniol, Anja Boisen
Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review