Fully integrated nanoresonator system with attogram/hz mass resolution

Esko Sebastian Forsén; G. Abadal; S.G. Nilsson; J. Verd; Rasmus Kousholt Sandberg; Winnie Edith Svendsen; J. Teva; F. Perez-Murano; J. Esteve; E. Figueras; F. Campabadal; L. Montelius; N. Barniol; Anja Boisen

Fully integrated nanoresonator system with attogram/hz mass resolution

Esko Sebastian Forsén, G. Abadal, S.G. Nilsson, J. Verd, Rasmus Kousholt Sandberg, Winnie Edith Svendsen, J. Teva, F. Perez-Murano, J. Esteve, E. Figueras, F. Campabadal, L. Montelius, N. Barniol, Anja Boisen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of MEMS 2005
Publication date	2005
Pages	556-559
Publication status	Published - 2005

Cite this

Forsén, E. S., Abadal, G., Nilsson, S. G., Verd, J., Sandberg, R. K., Svendsen, W. E., Teva, J., Perez-Murano, F., Esteve, J., Figueras, E., Campabadal, F., Montelius, L., Barniol, N., & Boisen, A. (2005). Fully integrated nanoresonator system with attogram/hz mass resolution. In Proceedings of MEMS 2005 (pp. 556-559)

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title = "Fully integrated nanoresonator system with attogram/hz mass resolution",

author = "Fors{\'e}n, {Esko Sebastian} and G. Abadal and S.G. Nilsson and J. Verd and Sandberg, {Rasmus Kousholt} and Svendsen, {Winnie Edith} and J. Teva and F. Perez-Murano and J. Esteve and E. Figueras and F. Campabadal and L. Montelius and N. Barniol and Anja Boisen",

year = "2005",

language = "English",

pages = "556--559",

booktitle = "Proceedings of MEMS 2005",

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Fully integrated nanoresonator system with attogram/hz mass resolution. / Forsén, Esko Sebastian; Abadal, G.; Nilsson, S.G.; Verd, J.; Sandberg, Rasmus Kousholt; Svendsen, Winnie Edith; Teva, J.; Perez-Murano, F.; Esteve, J.; Figueras, E.; Campabadal, F.; Montelius, L.; Barniol, N.; Boisen, Anja.

Proceedings of MEMS 2005. 2005. p. 556-559.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Fully integrated nanoresonator system with attogram/hz mass resolution

AU - Forsén, Esko Sebastian

AU - Abadal, G.

AU - Nilsson, S.G.

AU - Verd, J.

AU - Sandberg, Rasmus Kousholt

AU - Svendsen, Winnie Edith

AU - Teva, J.

AU - Perez-Murano, F.

AU - Esteve, J.

AU - Figueras, E.

AU - Campabadal, F.

AU - Montelius, L.

AU - Barniol, N.

AU - Boisen, Anja

PY - 2005

Y1 - 2005

M3 - Article in proceedings

SP - 556

EP - 559

BT - Proceedings of MEMS 2005

ER -