Fully integrated nanoresonator system with attogram/hz mass resolution

Esko Sebastian Forsén, G. Abadal, S.G. Nilsson, J. Verd, Rasmus Kousholt Sandberg, Winnie Edith Svendsen, J. Teva, F. Perez-Murano, J. Esteve, E. Figueras, F. Campabadal, L. Montelius, N. Barniol, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of MEMS 2005
    Publication date2005
    Pages556-559
    Publication statusPublished - 2005

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