Fully etched apodized grating coupler on the SOI platform with −058 dB coupling efficiency

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We design and fabricate an ultrahigh coupling efficiency (CE) fully etched apodized grating coupler on the silicon- on-insulator (SOI) platform using subwavelength photonic crystals and bonded aluminum mirror. Fabrication error sensitivity andcoupling angle dependence are experimentally investigated. A recordultrahighCE of − 0 . 58 dB with a 3 dB bandwidth of 71 nm and low back reflection are demonstrated.
Original languageEnglish
JournalOptics Letters
Volume39
Issue number18
Pages (from-to)5348-50
ISSN0146-9592
DOIs
Publication statusPublished - 2014
CitationsWeb of Science® Times Cited: No match on DOI

ID: 100044623