Abstract
We design and fabricate an ultrahigh coupling efficiency (CE) fully etched apodized grating coupler on the silicon-
on-insulator (SOI) platform using subwavelength photonic crystals and bonded aluminum mirror. Fabrication error
sensitivity andcoupling angle dependence are experimentally investigated. A recordultrahighCE of
−
0
.
58
dB
with a
3 dB bandwidth of 71 nm and low back reflection are demonstrated.
| Original language | English |
|---|---|
| Journal | Optics Letters |
| Volume | 39 |
| Issue number | 18 |
| Pages (from-to) | 5348-50 |
| ISSN | 0146-9592 |
| DOIs | |
| Publication status | Published - 2014 |