Fully etched apodized grating coupler on the SOI platform with −058 dB coupling efficiency

Yunhong Ding, Christophe Peucheret, Haiyan Ou, Kresten Yvind

Research output: Contribution to journalJournal articleResearchpeer-review


We design and fabricate an ultrahigh coupling efficiency (CE) fully etched apodized grating coupler on the silicon- on-insulator (SOI) platform using subwavelength photonic crystals and bonded aluminum mirror. Fabrication error sensitivity andcoupling angle dependence are experimentally investigated. A recordultrahighCE of − 0 . 58 dB with a 3 dB bandwidth of 71 nm and low back reflection are demonstrated.
Original languageEnglish
JournalOptics Letters
Issue number18
Pages (from-to)5348-50
Publication statusPublished - 2014

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