Full 3D characterization of high aspect ratio microstructures

Frederik Stöhr; Jonas Michael-Lindhard; Hugh Simons; Jörg Hübner; Flemming Jensen; Ole Hansen; Henning Friis Poulsen; Jørgen Garnæs

Full 3D characterization of high aspect ratio microstructures

Frederik Stöhr
, Jonas Michael-Lindhard
, Hugh Simons
, Jörg Hübner
, Flemming Jensen
, Ole Hansen
, Henning Friis Poulsen
, Jørgen Garnæs

DFM - Dansk Fundamental Metrologi A/S

Research output: Contribution to conference › Poster › Research › peer-review

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Original language	English
Publication date	2014
Publication status	Published - 2014
Event	40th International Conference on Micro and Nano Engineering - Lausanne, Switzerland Duration: 22 Sept 2014 → 26 Sept 2014 Conference number: 40 http://www.mne2014.org/

Conference

Conference	40th International Conference on Micro and Nano Engineering
Number	40
Country/Territory	Switzerland
City	Lausanne
Period	22/09/2014 → 26/09/2014
Internet address	http://www.mne2014.org/

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Poster MNE 7Final published version, 4.75 MB

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Cite this

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title = "Full 3D characterization of high aspect ratio microstructures",

author = "Frederik St{\"o}hr and Jonas Michael-Lindhard and Hugh Simons and J{\"o}rg H{\"u}bner and Flemming Jensen and Ole Hansen and Poulsen, \{Henning Friis\} and J{\o}rgen Garn{\ae}s",

year = "2014",

language = "English",

note = "40th International Conference on Micro and Nano Engineering, MNE 2014 ; Conference date: 22-09-2014 Through 26-09-2014",

url = "http://www.mne2014.org/",

}

TY - CONF

T1 - Full 3D characterization of high aspect ratio microstructures

AU - Stöhr, Frederik

AU - Michael-Lindhard, Jonas

AU - Simons, Hugh

AU - Hübner, Jörg

AU - Jensen, Flemming

AU - Hansen, Ole

AU - Poulsen, Henning Friis

AU - Garnæs, Jørgen

N1 - Conference code: 40

PY - 2014

Y1 - 2014

M3 - Poster

T2 - 40th International Conference on Micro and Nano Engineering

Y2 - 22 September 2014 through 26 September 2014

ER -