From VHF to UHF CMOS-MEMS Monolithically Integrated Resonators

Jordi Teva, Abadal Gabriel Berini, A. Uranga, J. Verd, F. Torres, J.L. Lopez, J. Esteve, F. Pérez-Murano, N. Barniol

    Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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    Material Science