From Modeling to Fabrication of Double Side Microstructured Silicon Windows for Infrared Gas Sensing in Harsh Environments

René Bergmann, Aliaksandra Ivinskaya, Jan Robert Kafka, Fridolin Okkels, Mogens Havsteen Jakobsen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    Commercial infrared windows used for gas sensing in the mid-IR range usually possess an anti-reflective coating. Those coatings can normally not withstand harsh environments, particularly not high temperatures. With a simple “3-step” fabrication process, high temperature resistant silicon windows (∅1") were manufactured. The windows show high temperature resistant sub-wavelength anti-reflective surface microstructures on both side faces. Thus, a peak transmittance of 100% for a defined main wavelength (5 μm) and more than 90 % average transmittance for the wavelength range of 5-7 μm was achieved. The modeling of the anti-reflective microstructures, their fabrication process and final transmittance analysis of the windows is discussed.
    Original languageEnglish
    Title of host publicationProceedings of 8th International Congress on Advanced Electromagnetic Materials in Microwaves and Optics (METAMATERIALS 2014)
    PublisherIEEE
    Publication date2014
    Pages58-60
    ISBN (Print)978-1-4799-3450-8
    DOIs
    Publication statusPublished - 2014
    Event8th International Congress on Advanced Electromagnetic Materials in Microwaves and Optics - DTU, Kgs. Lyngby, Denmark
    Duration: 25 Aug 201430 Aug 2014
    Conference number: 8
    http://congress2014.metamorphose-vi.org/

    Conference

    Conference8th International Congress on Advanced Electromagnetic Materials in Microwaves and Optics
    Number8
    LocationDTU
    CountryDenmark
    CityKgs. Lyngby
    Period25/08/201430/08/2014
    Internet address

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