Four-probe sensing of temperature during Joule heating of silicon

Asger Kjærgård Pedersen*, Daena Madhi, Daniil Mirosnikov, Peter Uhd Jepsen, Dirch Hjorth Petersen

*Corresponding author for this work

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

We present a four-probe setup for measuring temperature of Joule-heated silicon in two independent ways from the same voltage measurement: a method using the thermal dependence of resistivity and a method based on the measured sheet power density. The two methods are compared to optical temperature measurements made by fitting a gray-body model onto data from a commercial spectrometer. The two four-probe temperature measurements are conducted from 890 K to 1540 K, and they converge at temperatures above 1400 K indicating a high degree of self-consistency.
Original languageEnglish
Article number014903
JournalReview of Scientific Instruments
Volume92
Issue number1
Number of pages5
ISSN0034-6748
DOIs
Publication statusPublished - 2021

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