Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

Özlem Sardan, Karin Nordström Andersen, A. Nicole MacDonald, Peter Bøggild, Ole Sigmund, Andy Horsewell

Research output: Contribution to conferencePosterResearchpeer-review

Original languageEnglish
Publication date2008
Publication statusPublished - 2008
EventASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Brooklyn, NY, United States
Duration: 3 Aug 20086 Aug 2008

Conference

ConferenceASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
CountryUnited States
CityBrooklyn, NY
Period03/08/200806/08/2008

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