Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

Özlem Sardan, Karin Nordström Andersen, A. Nicole MacDonald, Peter Bøggild, Ole Sigmund, Andy Horsewell

Research output: Contribution to conferencePosterResearchpeer-review

Original languageEnglish
Publication date2008
Publication statusPublished - 2008
EventASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Brooklyn, NY, United States
Duration: 3 Aug 20086 Aug 2008

Conference

ConferenceASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
CountryUnited States
CityBrooklyn, NY
Period03/08/200806/08/2008

Cite this

Sardan, Ö., Nordström Andersen, K., MacDonald, A. N., Bøggild, P., Sigmund, O., & Horsewell, A. (2008). Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers. Poster session presented at ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Brooklyn, NY, United States.