Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

Özlem Sardan; Karin Nordström Andersen; A. Nicole MacDonald; Peter Bøggild; Ole Sigmund; Andy Horsewell

Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

Özlem Sardan, Karin Nordström Andersen, A. Nicole MacDonald, Peter Bøggild, Ole Sigmund, Andy Horsewell

Research output: Contribution to conference › Poster › Research › peer-review

Original language	English
Publication date	2008
Publication status	Published - 2008
Event	ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Brooklyn, NY, United States Duration: 3 Aug 2008 → 6 Aug 2008

Conference

Conference	ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
Country/Territory	United States
City	Brooklyn, NY
Period	03/08/2008 → 06/08/2008

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Sardan, Ö., Nordström Andersen, K., MacDonald, A. N., Bøggild, P., Sigmund, O., & Horsewell, A. (2008). Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers. Poster session presented at ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Brooklyn, NY, United States.

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year = "2008",

language = "English",

note = "ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008 ; Conference date: 03-08-2008 Through 06-08-2008",

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Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers. / Sardan, Özlem; Nordström Andersen, Karin; MacDonald, A. Nicole et al.
2008. Poster session presented at ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Brooklyn, NY, United States.

Research output: Contribution to conference › Poster › Research › peer-review

TY - CONF

T1 - Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

AU - Sardan, Özlem

AU - Nordström Andersen, Karin

AU - MacDonald, A. Nicole

AU - Bøggild, Peter

AU - Sigmund, Ole

AU - Horsewell, Andy

PY - 2008

Y1 - 2008

M3 - Poster

T2 - ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference

Y2 - 3 August 2008 through 6 August 2008

ER -