Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

Özlem Sardan; Karin Nordström Andersen; A. Nicole MacDonald; Peter Bøggild; Ole Sigmund; Andy Horsewell

Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

Özlem Sardan, Karin Nordström Andersen, A. Nicole MacDonald, Peter Bøggild, Ole Sigmund, Andy Horsewell

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the ASME 2008 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference
Publisher	The American Society of Mechanical Engineers (ASME)
Publication date	2008
Pages	629-631
Publication status	Published - 2008
Event	ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Brooklyn, NY, United States Duration: 3 Aug 2008 → 6 Aug 2008

Conference

Conference	ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
Country/Territory	United States
City	Brooklyn, NY
Period	03/08/2008 → 06/08/2008

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Sardan, Ö., Nordström Andersen, K., MacDonald, A. N., Bøggild, P., Sigmund, O., & Horsewell, A. (2008). Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers. In Proceedings of the ASME 2008 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (pp. 629-631). The American Society of Mechanical Engineers (ASME).

Sardan, Özlem ; Nordström Andersen, Karin ; MacDonald, A. Nicole et al. / Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers. Proceedings of the ASME 2008 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference. The American Society of Mechanical Engineers (ASME), 2008. pp. 629-631

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title = "Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers",

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year = "2008",

language = "English",

pages = "629--631",

booktitle = "Proceedings of the ASME 2008 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference",

publisher = "The American Society of Mechanical Engineers (ASME)",

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Sardan, Ö, Nordström Andersen, K, MacDonald, AN, Bøggild, P , Sigmund, O & Horsewell, A 2008, Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers. in Proceedings of the ASME 2008 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference. The American Society of Mechanical Engineers (ASME), pp. 629-631, ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Brooklyn, NY, United States, 03/08/2008.

Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers. / Sardan, Özlem; Nordström Andersen, Karin; MacDonald, A. Nicole et al.
Proceedings of the ASME 2008 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference. The American Society of Mechanical Engineers (ASME), 2008. p. 629-631.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

AU - Sardan, Özlem

AU - Nordström Andersen, Karin

AU - MacDonald, A. Nicole

AU - Bøggild, Peter

AU - Sigmund, Ole

AU - Horsewell, Andy

PY - 2008

Y1 - 2008

M3 - Article in proceedings

SP - 629

EP - 631

BT - Proceedings of the ASME 2008 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference

PB - The American Society of Mechanical Engineers (ASME)

T2 - ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference

Y2 - 3 August 2008 through 6 August 2008

ER -

Sardan Ö, Nordström Andersen K, MacDonald AN, Bøggild P , Sigmund O, Horsewell A. Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers. In Proceedings of the ASME 2008 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference. The American Society of Mechanical Engineers (ASME). 2008. p. 629-631