Fluorocarbon Films Deposited by Deep Reactive Ion Etching for Stiction Minimization of MEMS Structures

Yanxin Zhuang, Aric Kumaran Menon

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the World Tribology Congress III
    Publication date2005
    Publication statusPublished - 2005
    EventWorld Tribology Congress III - Washington DC, United States
    Duration: 12 Sep 200516 Sep 2005
    Conference number: 3


    ConferenceWorld Tribology Congress III
    CountryUnited States
    CityWashington DC

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