Fluorocarbon Films Deposited by Deep Reactive Ion Etching for Stiction Minimization of MEMS Structures

Yanxin Zhuang, Aric Kumaran Menon

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the World Tribology Congress III
Publication date	2005
Publication status	Published - 2005
Event	World Tribology Congress III - Washington DC, United States Duration: 12 Sept 2005 → 16 Sept 2005 Conference number: 3

Conference	World Tribology Congress III
Number	3
Country/Territory	United States
City	Washington DC
Period	12/09/2005 → 16/09/2005

OpenUrl availability

@inproceedings{8d21ee075a26466d85aaf214e49e602e,

title = "Fluorocarbon Films Deposited by Deep Reactive Ion Etching for Stiction Minimization of MEMS Structures",

author = "Yanxin Zhuang and Menon, {Aric Kumaran}",

year = "2005",

language = "English",

booktitle = "Proceedings of the World Tribology Congress III",

note = "World Tribology Congress III, WTC2005 ; Conference date: 12-09-2005 Through 16-09-2005",

}

TY - GEN

T1 - Fluorocarbon Films Deposited by Deep Reactive Ion Etching for Stiction Minimization of MEMS Structures

AU - Zhuang, Yanxin

AU - Menon, Aric Kumaran

N1 - Conference code: 3

PY - 2005

Y1 - 2005

M3 - Article in proceedings

BT - Proceedings of the World Tribology Congress III

T2 - World Tribology Congress III

Y2 - 12 September 2005 through 16 September 2005

ER -