FLEXIBLE STRUCTURE WITH INTEGRATED SENSOR/ACTUATOR

Jacob Thaysen; Ole Hansen; Aric Kumaran Menon; Anja Boisen

FLEXIBLE STRUCTURE WITH INTEGRATED SENSOR/ACTUATOR

Jacob Thaysen (Inventor)
, Ole Hansen (Inventor)
, Aric Kumaran Menon (Inventor)
, Anja Boisen (Inventor)

Research output: Patent

Abstract

A polymer-based flexible structure with integrated sensing/actuator means is presented. Conventionally, silicon has been used as a piezo-resistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that e.g. an SU-8 based polymer is much softer than silicon and that e.g. a gold resistor is easily incorporated in SU-8 based polymer structure it has been demonstrated that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezo-resistive cantilever.

Original language	English
Patent number	WO2003022731
Country/Territory	International Bureau of the World Intellectual Property Organization (WIPO)
Publication status	Published - 2003

Bibliographical note

International application published under the World Intellectual Property Organization (WIPO)

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title = "FLEXIBLE STRUCTURE WITH INTEGRATED SENSOR/ACTUATOR",

abstract = "A polymer-based flexible structure with integrated sensing/actuator means is presented. Conventionally, silicon has been used as a piezo-resistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that e.g. an SU-8 based polymer is much softer than silicon and that e.g. a gold resistor is easily incorporated in SU-8 based polymer structure it has been demonstrated that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezo-resistive cantilever.",

author = "Jacob Thaysen and Ole Hansen and Menon, \{Aric Kumaran\} and Anja Boisen",

note = "International application published under the World Intellectual Property Organization (WIPO); WO2003022731",

year = "2003",

language = "English",

type = "Patent",

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TY - PAT

T1 - FLEXIBLE STRUCTURE WITH INTEGRATED SENSOR/ACTUATOR

AU - Thaysen, Jacob

AU - Hansen, Ole

AU - Menon, Aric Kumaran

AU - Boisen, Anja

N1 - International application published under the World Intellectual Property Organization (WIPO)

PY - 2003

Y1 - 2003

N2 - A polymer-based flexible structure with integrated sensing/actuator means is presented. Conventionally, silicon has been used as a piezo-resistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that e.g. an SU-8 based polymer is much softer than silicon and that e.g. a gold resistor is easily incorporated in SU-8 based polymer structure it has been demonstrated that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezo-resistive cantilever.

AB - A polymer-based flexible structure with integrated sensing/actuator means is presented. Conventionally, silicon has been used as a piezo-resistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that e.g. an SU-8 based polymer is much softer than silicon and that e.g. a gold resistor is easily incorporated in SU-8 based polymer structure it has been demonstrated that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezo-resistive cantilever.

M3 - Patent

M1 - WO2003022731

ER -

FLEXIBLE STRUCTURE WITH INTEGRATED SENSOR/ACTUATOR

Abstract

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