FLEXIBLE STRUCTURE WITH INTEGRATED SENSOR/ACTUATOR

Jacob Thaysen (Inventor), Ole Hansen (Inventor), Aric Kumaran Menon (Inventor), Anja Boisen (Inventor)

    Research output: Patent

    Abstract

    A polymer-based flexible structure with integrated sensing/actuator means is presented. Conventionally, silicon has been used as a piezo-resistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that e.g. an SU-8 based polymer is much softer than silicon and that e.g. a gold resistor is easily incorporated in SU-8 based polymer structure it has been demonstrated that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezo-resistive cantilever.
    Original languageEnglish
    Patent numberWO2003022731
    CountryInternational Bureau of the World Intellectual Property Organization (WIPO)
    Publication statusPublished - 2003

    Bibliographical note

    International application published under the World Intellectual Property Organization (WIPO)

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