Flexible stamp for thermal nanoimprint lithography

Theodor Nielsen; Rasmus Haugstrup Pedersen

Flexible stamp for thermal nanoimprint lithography

Theodor Nielsen, Rasmus Haugstrup Pedersen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, EIPBN49
Publication date	2005
Publication status	Published - 2005
Event	49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication - Orlando, FL, United States Duration: 31 May 2005 → 3 Jun 2005 Conference number: 49

Conference

Conference	49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
Number	49
Country/Territory	United States
City	Orlando, FL
Period	31/05/2005 → 03/06/2005

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@inproceedings{6cc280e8a532484f955a47f4ae842db5,

title = "Flexible stamp for thermal nanoimprint lithography",

author = "Theodor Nielsen and Pedersen, {Rasmus Haugstrup}",

year = "2005",

language = "English",

booktitle = "Proceedings of 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, EIPBN49",

note = "49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, EIPBN49 ; Conference date: 31-05-2005 Through 03-06-2005",

}

TY - GEN

T1 - Flexible stamp for thermal nanoimprint lithography

AU - Nielsen, Theodor

AU - Pedersen, Rasmus Haugstrup

N1 - Conference code: 49

PY - 2005

Y1 - 2005

M3 - Article in proceedings

BT - Proceedings of 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, EIPBN49

T2 - 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication

Y2 - 31 May 2005 through 3 June 2005

ER -