Flexible stamp for thermal nanoimprint lithography

Theodor Nielsen, Rasmus Haugstrup Pedersen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, EIPBN49
    Publication date2005
    Publication statusPublished - 2005
    Event49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication - Orlando, FL, United States
    Duration: 31 May 20053 Jun 2005
    Conference number: 49

    Conference

    Conference49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
    Number49
    CountryUnited States
    CityOrlando, FL
    Period31/05/200503/06/2005

    Cite this

    Nielsen, T., & Pedersen, R. H. (2005). Flexible stamp for thermal nanoimprint lithography. In Proceedings of 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, EIPBN49