Flexible stamp for thermal nanoimprint lithography

Theodor Nielsen, Rasmus Haugstrup Pedersen, Ole Hansen, J. Ahopelto, Anders Kristensen

Research output: Contribution to conferencePosterResearchpeer-review

Original languageEnglish
Publication date2005
Publication statusPublished - 2005
Event49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication - Orlando, FL, United States
Duration: 31 May 20053 Jun 2005
Conference number: 49

Conference

Conference49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
Number49
CountryUnited States
CityOrlando, FL
Period31/05/200503/06/2005

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