Flexible Stamp for Homegenous Large Area Thermal NIL

Theodor Nielsen, R.H. Pedersen, Ole Hansen, T. Haatainen, A. Tollki, J. Ahopelto, Anders Kristensen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Third International Conference on Nanoimprint and Nanoprint Technology (NNT)
    Publication date2004
    Publication statusPublished - 2004

    Cite this

    Nielsen, T., Pedersen, R. H., Hansen, O., Haatainen, T., Tollki, A., Ahopelto, J., & Kristensen, A. (2004). Flexible Stamp for Homegenous Large Area Thermal NIL. In Proceedings of the Third International Conference on Nanoimprint and Nanoprint Technology (NNT)