Flexible Stamp for Homegenous Large Area Thermal NIL

Theodor Nielsen, R.H. Pedersen, Ole Hansen, T. Haatainen, A. Tollki, J. Ahopelto, Anders Kristensen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the Third International Conference on Nanoimprint and Nanoprint Technology (NNT)
Publication date	2004
Publication status	Published - 2004

OpenUrl availability

@inproceedings{5f398fc74e924e7db4fc3502d8f07a70,

title = "Flexible Stamp for Homegenous Large Area Thermal NIL",

author = "Theodor Nielsen and R.H. Pedersen and Ole Hansen and T. Haatainen and A. Tollki and J. Ahopelto and Anders Kristensen",

year = "2004",

language = "English",

booktitle = "Proceedings of the Third International Conference on Nanoimprint and Nanoprint Technology (NNT)",

}